Preparation method of ultra-high-purity aluminum

A pure aluminum, ultra-high technology, applied in the field of ultra-high-purity aluminum preparation, can solve the problems that the product is difficult to meet the 6.5N standard, it is difficult to effectively remove metal impurities, and the graphite boat cannot be reused, so as to shorten the purification time and improve the purification efficiency. The effect is remarkable and the effect of preventing material oxidation

Active Publication Date: 2021-09-21
广东先导微电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method has the following defects: (1) it is difficult to effectively remove metal impurities such as titanium, vanadium, chromium, etc., and the product is difficult to meet the 6.5N standard; (2) after regional smelting, aluminum will stick to the graphite boat, making it difficult to take out the aluminum. cannot be reused

Method used

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  • Preparation method of ultra-high-purity aluminum
  • Preparation method of ultra-high-purity aluminum
  • Preparation method of ultra-high-purity aluminum

Examples

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Effect test

preparation example Construction

[0058] The preparation method of ultra-high-purity aluminum according to the present disclosure includes steps:

[0059]Step 1, put the 5N raw material aluminum ingot into the graphite boat raw material tank 1, the graphite boat raw material tank 1 is adjacent to the graphite boat product tank 2, spaced from each other and communicated above, cover the graphite cover 3 so that the graphite cover 3 and the graphite boat raw material Groove 1 and graphite boat product groove 2 form the cavity S that is all closed except that the side of graphite boat product groove 2 far away from graphite boat raw material groove 1 has communication port P1, and graphite cover 3, graphite boat raw material groove 1 , Graphite boat product tank 2 is packed into vacuum distillation furnace together with raw material aluminum ingot, then loads into the dust collection tank 4 that has vacuum port (P2) so that the inner cavity of dust collection tank 4 communicates with communication port P1, and cov...

Embodiment 1

[0091] Ultrahigh-purity aluminum was prepared as follows.

[0092] Step 1: Put the 5N raw material aluminum ingot into the raw material tank 1 of the graphite boat. The raw material tank 1 of the graphite boat is adjacent to the product tank 2 of the graphite boat, separated from each other and communicated above. Cover the graphite cover 3 so that the graphite cover 3 and the raw material of the graphite boat Groove 1 and graphite boat product groove 2 form the cavity S except that there is communication port P1 on the side far away from graphite boat raw material groove 1 of graphite boat product groove 2, graphite cover 3, graphite boat raw material groove 1, graphite boat product groove 2 Put the raw material aluminum ingot into the vacuum distillation furnace, and then put it into the dust collection tank 4 with the vacuum port P2 so that the inner cavity of the dust collection tank 4 is connected with the communication port P1, cover the furnace cover 5, and the external ...

Embodiment 2

[0103] The operation steps are the same as in Example 1, the difference is that

[0104] In step 1, the temperature of the first zone corresponding to graphite boat raw material tank 1 is 1300°C, the temperature of the second zone corresponding to graphite boat product tank 2 is controlled at 700°C, the distillation time is 12h, and the aluminum in graphite boat product tank 2 The yield is 71%;

[0105] In step five, the length of the other glassy carbon boat or boron nitride boat 20 is 72cm;

[0106] In step seven, the operating speed of the heater 22 is 25 mm / h and the length of the melting zone M formed after the aluminum ingot is melted is maintained at 8 cm;

[0107] In step 8, repeat the regional operation 10 times in total;

[0108] In step nine, remove 15cm from the head and tail of the aluminum ingot.

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Abstract

The invention provides a preparation method of ultra-high-purity aluminum, which comprises the following steps that 1, vacuum distillation is carried out on an aluminum ingot is carried out, and aluminum is taken out after cooling; 2, a glassy carbon boat or a boron nitride boat is treated with aqua regia; 3, the aluminum obtained in the step 1 is molten in a high-purity graphite crucible, and the molten aluminum is poured into the glassy carbon boat or the boron nitride boat to be cooled to obtain the aluminum ingot; 4, the aluminum ingot is corroded with an acid solution; 5, the aluminum ingot is put into a quartz tube of a zone melting furnace; 6, inert gas is introduced into the quartz tube for a period of time, a valve is closed, a hydrogen valve is opened, and hydrogen is introduced into the quartz tube; 7, a heater is turned on, and the temperature is adjusted; 8, when the heater moves to the tail of the boat, heating is stopped, the heater returns to the original point, and secondary zone melting operation is carried out; 9, after zone melting is completed, heating is stopped, the aluminum ingot is taken out, and the head and the tail of the aluminum ingot are removed; and 10, the obtained aluminum product is operated again according to the fourth step to the ninth step, and MBE-level 6.5 N ultra-high-purity aluminum can be obtained.

Description

technical field [0001] The disclosure relates to the field of high-purity metal materials, in particular to a method for preparing ultra-high-purity aluminum. Background technique [0002] Ultra-high-purity 6.5N aluminum is mainly grown by molecular beam epitaxy (MBE). [0003] At present, the main preparation methods of high-purity aluminum include: segregation method, directional solidification method, and zone smelting method. The main defect of these methods is that metal impurities such as titanium, vanadium and chromium cannot be effectively removed, and the products are difficult to reach the ultra-high-purity aluminum standard. [0004] The Chinese Patent Application Publication No. CN104388697A published on March 4, 2015 discloses a method for preparing 6N high-purity aluminum. First, the raw material aluminum is volatilized in a vacuum, and then zone smelted to produce 6N high-purity aluminum. This method has the following defects: (1) it is difficult to effectiv...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C22B21/06C22B9/05C22B9/04C22B9/02B22D7/06
CPCC22B21/068C22B21/064C22B9/04C22B9/02C22B9/05B22D7/068C22B9/006Y02P10/20
Inventor 李清宇何志达朱刘黄杰杰
Owner 广东先导微电子科技有限公司
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