Wafer edge exposure method, wafer edge exposure device and mask plate
An edge exposure and mask technology, applied in the field of mask, wafer edge exposure device, wafer edge exposure, can solve the problems of effective wafer damage, affecting the quality of the wafer, etc., to reduce damage and ensure the exposure effect. Effect
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[0023] In order to make the object, technical solution and advantages of the present invention clearer, various embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. However, those of ordinary skill in the art can understand that, in each implementation manner of the present invention, many technical details are provided for readers to better understand the present application. However, even without these technical details and various changes and modifications based on the following implementation modes, the technical solution claimed in this application can also be realized.
[0024] The first embodiment of the present invention relates to a wafer edge exposure method. The specific process is as figure 1 shown. Include the following steps:
[0025] Step S101: providing a wafer, the edge of the wafer has a plurality of regions to be exposed and a non-exposed region adjacent to the regions to be exposed.
[002...
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