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Cooling water jacket and processing method thereof

A processing method and technology for cooling water jackets, which are applied to cooling fluid circulation devices, household refrigeration devices, lighting and heating equipment, etc., can solve the problem of large gap between stainless steel pipes and aluminum substrates, weak ability of water pipes to cool aluminum substrates, and increased complexity Waterway structure and other issues, to achieve the effect of beautiful surface appearance, good waterway uniformity, no shrinkage porosity and shrinkage cavity

Pending Publication Date: 2021-09-28
上海睿昇半导体科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] At present, some products weld stainless steel tubes on the outer circumference of aluminum. The gap between the stainless steel tubes and the aluminum substrate is large, and the ability of the water pipe to cool the aluminum substrate is weak. Some use sand casting methods, but it is impossible to add complex waterway structures to the products. After trachoma, casting defects are obvious, and the product has a high risk of water leakage

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  • Cooling water jacket and processing method thereof
  • Cooling water jacket and processing method thereof

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Embodiment Construction

[0039] It should be understood that in the description of the present invention, the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", " The orientations or positional relationships indicated by "vertical", "horizontal", "top", "bottom", "inner" and "outer" are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and Simplified descriptions, rather than indicating or implying that the device or element referred to must have a particular orientation, be constructed and operate in a particular orientation, and thus should not be construed as limiting the invention. In addition, the terms "first", "second", etc. are used for descriptive purposes only, and should not be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, a feature defined as "first", "second...

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Abstract

The invention provides a cooling water jacket and a processing method thereof. The cooling water jacket comprises a barrel, two openings are formed in the same end of the barrel, a cooling pipeline is embedded in the barrel, and a water inlet and a water outlet of the cooling pipeline are connected out through the openings. The processing method comprises the steps that a straight pipe is bent to obtain the cooling pipeline, the barrel is formed after casting molding, and the cooling pipeline is embedded into the barrel. In the cooling water jacket and the processing method thereof, the stainless steel cooling pipeline is manufactured through pipe bending equipment, then the cooling water jacket containing the stainless steel pipeline is manufactured through low-pressure casting, after the cooling water jacket is cast, the wall is thin, water channel uniformity is good, the cooling speed is high, no shrinkage porosity or shrinkage cavity is generated after casting, and the product surface appearance is attractive.

Description

technical field [0001] The invention belongs to the technical field of semiconductor equipment design, and relates to a processing method of a cooling water jacket, in particular to a cooling water jacket and a processing method thereof. Background technique [0002] A kind of water jacket used in semiconductor cooling equipment is mainly used in photolithography equipment. At present, some products weld stainless steel tubes on the outer circumference of aluminum, and the gap between stainless steel tubes and aluminum substrates is large; in addition, some use sand casting methods. A similar product is also available. Low-pressure casting refers to a casting method in which the mold is generally placed above a sealed crucible, and compressed air is introduced into the crucible to cause low pressure on the surface of the molten metal, so that the molten metal rises from the riser to fill the mold and control solidification. [0003] CN104534909A discloses a water cooling ja...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B22D19/00B22D18/04F25D1/02F25D17/02
CPCB22D19/0072B22D18/04F25D1/02F25D17/02
Inventor 姚力军潘杰昝小磊鲍伟江王学泽占卫君
Owner 上海睿昇半导体科技有限公司