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Vertical testing device and sheet-shaped probe thereof

A test device and vertical technology, applied in the field of probe heads, can solve the problems of difficulty in reducing production and maintenance costs, difficulty in needle implantation and maintenance and replacement of conductive probes, and achieve the effect of reducing production and maintenance costs

Pending Publication Date: 2021-11-09
CHUNGHWA PRECISION TEST TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Accordingly, the conductive probes in the existing vertical testing device are not easy to implant and maintain and replace, which makes it difficult to reduce production and maintenance costs

Method used

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  • Vertical testing device and sheet-shaped probe thereof
  • Vertical testing device and sheet-shaped probe thereof
  • Vertical testing device and sheet-shaped probe thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] see Figure 1 to Figure 5 As shown, it is Embodiment 1 of the present invention. This embodiment discloses a vertical test device 1000, which includes a probe head 100 and one side abutting against the probe head 100 (probe head) (such as: figure 1 An adapter board 200 (space transformer) on the top side of the probe head 100 in the middle), and the other side of the probe head 100 ( figure 1 The probe head 100 in the bottom side) can be used to test a device under test (device under test, DUT) (not shown in the figure, such as: semiconductor wafer).

[0032] It should be noted that, in order to facilitate the understanding of this embodiment, the drawings only show the partial structure of the vertical test device 1000, so as to clearly show the structure and connection relationship of the various components of the vertical test device 1000, but The present invention is not limited by the accompanying drawings. The structure of each component of the probe head 100 a...

Embodiment 2

[0057] see Figure 6 to Figure 8 As shown, it is Embodiment 2 of the present invention. Since this embodiment is similar to the above-mentioned Embodiment 1, the similarities between the two embodiments will not be repeated, and the differences between this embodiment and the above-mentioned Embodiment 1 are roughly described as follows :

[0058] In each of the sheet probes 5 in this embodiment, the stroke portion 54 is located in a projection area P formed by the orthographic projection of the sheet body 51 along the height direction H, so that each The sheet probes 5 can be sequentially inserted into the first guide plate unit 1 and the second guide plate unit 2 along the height direction H.

[0059] In detail, the first contact portion 52, the stroke portion 54 and the second contact portion 53 of the sheet probe 5 are all located between the sheet body 51 along the length direction L and the Within the space virtually extended by the height direction H, but the present ...

Embodiment 3

[0062] see Figure 9 As shown, it is the third embodiment of the present invention. Since this embodiment is similar to the above-mentioned first embodiment, the similarities between the two embodiments will not be repeated, and the differences between this embodiment and the above-mentioned first embodiment are roughly described as follows :

[0063] In this embodiment, in the first guide plate unit 1 in the corresponding two first elongated holes 111, one of the two first elongated holes 111 is the first elongated hole 111 A tenon 112 is formed inside (the cross-section is roughly rectangular), and the other first elongated hole 111 is not formed with the tenon 112 . For example, in other embodiments not shown in the present invention, one tenon 112 can be formed in each of the corresponding two first elongated holes 111 , but the present invention is not limited thereto. .

[0064] Each of the sheet bodies 51 is disposed in two corresponding first elongated holes 111 , a...

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PUM

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Abstract

The invention discloses a vertical testing device and a sheet-shaped probe thereof. The sheet-shaped probe comprises a sheet body, a first contact part, a stroke part and a second contact part. The sheet body has a length in a length direction, the sheet body has a thickness in a thickness direction perpendicular to the length direction, and a ratio of the length divided by the thickness ranges from 25 to 85. The first contact part is formed by extending from the top edge of the sheet body. The stroke part is formed by bending and extending from the bottom edge of the sheet body to the direction far away from the sheet body, and the stroke part can be stressed and deformed to generate resilience force. The second contact part is formed by extending from the end edge, far away from the sheet body, of the stroke part. Therefore, the sheet body is positioned on a first guide plate unit, and the stroke section can provide the stroke required by the sheet-shaped probe to detect the stress without dislocation, so that the vertical testing device can conveniently carry out plant, maintain and replace the sheet-shaped probe.

Description

technical field [0001] The invention relates to a probe head, in particular to a vertical testing device and a sheet probe. Background technique [0002] The existing vertical test device includes a plurality of guide plates and a plurality of conductive probes passing through the plurality of guide plates, and each of the above-mentioned conductive probes will be positioned by the misalignment of the two guide plate units on the opposite side of the spacer plate , and deformed into a curved section, so as to provide the travel required by the conductive probe for detection. Accordingly, the conductive probes in the existing vertical testing device are not easy to implant, maintain and replace, which makes it difficult to reduce production and maintenance costs. [0003] Therefore, the inventor believes that the above-mentioned defects can be improved, Naite devoted himself to research and combined with the application of scientific principles, and finally proposed an inven...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R1/073
CPCG01R1/07314G01R1/07357G01R1/07364
Inventor 李文聪魏逊泰李晓刚丁亘生
Owner CHUNGHWA PRECISION TEST TECH