Vertical testing device and sheet-shaped probe thereof
A test device and vertical technology, applied in the field of probe heads, can solve the problems of difficulty in reducing production and maintenance costs, difficulty in needle implantation and maintenance and replacement of conductive probes, and achieve the effect of reducing production and maintenance costs
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Embodiment 1
[0031] see Figure 1 to Figure 5 As shown, it is Embodiment 1 of the present invention. This embodiment discloses a vertical test device 1000, which includes a probe head 100 and one side abutting against the probe head 100 (probe head) (such as: figure 1 An adapter board 200 (space transformer) on the top side of the probe head 100 in the middle), and the other side of the probe head 100 ( figure 1 The probe head 100 in the bottom side) can be used to test a device under test (device under test, DUT) (not shown in the figure, such as: semiconductor wafer).
[0032] It should be noted that, in order to facilitate the understanding of this embodiment, the drawings only show the partial structure of the vertical test device 1000, so as to clearly show the structure and connection relationship of the various components of the vertical test device 1000, but The present invention is not limited by the accompanying drawings. The structure of each component of the probe head 100 a...
Embodiment 2
[0057] see Figure 6 to Figure 8 As shown, it is Embodiment 2 of the present invention. Since this embodiment is similar to the above-mentioned Embodiment 1, the similarities between the two embodiments will not be repeated, and the differences between this embodiment and the above-mentioned Embodiment 1 are roughly described as follows :
[0058] In each of the sheet probes 5 in this embodiment, the stroke portion 54 is located in a projection area P formed by the orthographic projection of the sheet body 51 along the height direction H, so that each The sheet probes 5 can be sequentially inserted into the first guide plate unit 1 and the second guide plate unit 2 along the height direction H.
[0059] In detail, the first contact portion 52, the stroke portion 54 and the second contact portion 53 of the sheet probe 5 are all located between the sheet body 51 along the length direction L and the Within the space virtually extended by the height direction H, but the present ...
Embodiment 3
[0062] see Figure 9 As shown, it is the third embodiment of the present invention. Since this embodiment is similar to the above-mentioned first embodiment, the similarities between the two embodiments will not be repeated, and the differences between this embodiment and the above-mentioned first embodiment are roughly described as follows :
[0063] In this embodiment, in the first guide plate unit 1 in the corresponding two first elongated holes 111, one of the two first elongated holes 111 is the first elongated hole 111 A tenon 112 is formed inside (the cross-section is roughly rectangular), and the other first elongated hole 111 is not formed with the tenon 112 . For example, in other embodiments not shown in the present invention, one tenon 112 can be formed in each of the corresponding two first elongated holes 111 , but the present invention is not limited thereto. .
[0064] Each of the sheet bodies 51 is disposed in two corresponding first elongated holes 111 , a...
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