All-dielectric metasurface refractive index sensor and preparation method thereof

Abstract

The invention discloses an all-dielectric metasurface refractive index sensor and a preparation method thereof, which can be applied to the technical field of metasurfaces. The sensor is composed of a plurality of dielectric metasurface structure unit arrays, and each of the plurality of dielectric metasurface structure unit arrays comprises a glass substrate and a dielectric metasurface structure unit; the dielectric metasurface structure unit is arranged on the glass substrate, the dielectric metasurface structure unit comprises a square dielectric block and two semi-circular-ring-shaped dielectric cylinders, the square dielectric block is arranged at the right center of the dielectric metasurface structure unit. The outer curved surfaces of the two semi-circular-ring-shaped dielectric cylinders are respectively connected with two opposite side surfaces of the square dielectric block, the openings of the two semi-circular dielectric cylinders are outward relative to the square dielectric block, and each dielectric metasurface structure unit is in central symmetry. Ohmic loss caused by metal materials is avoided, and the symmetry of the structure in the incident light polarization direction is damaged, so that the quality factor and the resolution ratio of the sensor are improved.

Description

technical field [0001] The invention relates to the technical field of metasurfaces, in particular to an all-dielectric metasurface refractive index sensor and a preparation method thereof. Background technique [0002] Life science and nanotechnology are two research hotspots in the field of science today. With the development of biosensing technology and nanotechnology, in recent years, micro-nano optical refractive index sensors have become more and more important in the field of optical biosensing due to their compact structure and high sensitivity to the refractive index of the surrounding environment. Become a hotspot in the frontier research field. In the field of biosensing, the refractive index sensor responds to changes in the number of biomolecules through subtle changes in the refractive index of the solution. Compared with detection methods such as fluorescent labeling and electrochemical analysis, it can realize real-time, label-free sensing and has operationa...

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Problems solved by technology

The metal micro-nano optical sensor based on SPR technology has inevitable ohmic loss, which leads to a large full width at half maximum of the transmission / reflection characteristic peak of the sensor used for sensing detection, and the low quality factor of the sensor limits its sensing performance. Improve; the measurement range of the microstructure fiber sensor based on fiber optic sensing technology is limited due to the cut-off wavelength of the fiber, and at the same time, due to the geometry of the fiber, it is difficult to combine with the traditional micro-nano patterning technology and photolithography technology, which limits The integration of optical fiber-based sensors with other on-chip optical components and microsystems; micro-nano sensors based on photonic crystal microcavity technology need artificially introduced defects, and have high requirements for wave sources and defect layer materials, resulting in its preparation and Higher cost of sensor systems

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