Spectral confocal scanning displacement sensor device and use method thereof
A sensor device, a technology of scanning displacement, applied in measurement devices, color/spectral characteristic measurement, instruments, etc., can solve the problems of inconvenient popularization, high design and manufacturing cost, easy to be affected by errors, etc., and achieve compact structure and compact structure. The effect of reduced design and stable and reliable performance
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[0059] like figure 2 As shown, as the second embodiment of the present invention, the optical signal receiving component uses a spectrometer 12 to receive and process the optical signal passing through the second focusing lens group 11 through the spectrometer. Since the response of the spectrometer is slow, it will affect the measurement efficiency. This implementation mode is only applicable to scenarios that require high-precision measurement and do not require high measurement efficiency.
[0060] A method for using a spectral confocal scanning displacement sensor device of the present invention, using such as figure 1 , 2Shown is a spectral confocal scanning displacement sensor device, the specific steps are as follows:
[0061] S1, adjust the multi-spectral light source 1, the first collimating lens group 2, the beam splitter 3, the first focusing lens group 4, the illumination pinhole 6, the second collimating lens group 7, the dispersion focusing lens group 8 and th...
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