TBC solar cell and manufacturing method thereof

Abstract

The invention provides a TBC solar cell and a manufacturing method thereof. The manufacturing method comprises the following steps: providing an N-type silicon wafer substrate, and forming a textured structure on the front surface of the N-type silicon wafer substrate; sequentially forming a silicon oxide layer and a polycrystalline silicon layer which are stacked on the back surface of the N-type silicon wafer substrate; forming P-type doped regions and N-type doped regions which are sequentially, alternately and linearly arranged in the polycrystalline silicon layer of the N-type silicon wafer substrate; forming a first silicon nitride antireflection layer on the polycrystalline silicon layer of the N-type silicon wafer substrate, and forming a second silicon nitride antireflection layer on the textured structure; and respectively forming a positive electrode and a negative electrode on the first silicon nitride antireflection layer of the N-type silicon wafer substrate to obtain the TBC solar cell. According to the manufacturing method of the TBC solar cell, the production process of the TBC solar cell is simplified, the mass production capacity and the market competitiveness can be improved, and the efficiency of the cell can be improved.

Description

technical field [0001] The invention belongs to the technical field of solar cells, and in particular relates to a TBC solar cell and a manufacturing method thereof. Background technique [0002] In the prior art, the preparation process of TBC solar cells (Tunneling oxide passivated contact BackContact, tunneling oxide layer passivated contact back contact cells) almost requires more than 20 process steps, and there are problems such as long process and high production cost. Moreover, there are many unstable factors in the whole process. For example, due to various chemical cleaning processes included in the preparation process, it is easy to cause problems such as passivation layer damage, positive and negative short-circuit leakage, etc., which seriously affect the improvement of efficiency and quantity. Due to the stability of production, there is currently no mature, simple and stable preparation process for TBC solar cells suitable for mass production. Contents of th...

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Problems solved by technology

[0002] In the prior art, the preparation process of TBC solar cells (Tunneling oxide passivated contact BackContact, tunneling oxide layer passivated contact back contact cells) almost requires more than 20 process steps, and there are problems such as long process and high production cost. Moreover, there are many unstable factors in the whole process. For example, due to various chemical cleaning processes included in the preparation process, it is easy to cause problems such as passivation layer damage, positive and negative short-circuit leakage, etc., which seriously affect the improvement of efficiency and quantity. Due to the stability of production, there is no mature, simple and stable TBC solar cell preparation process suitable for mass production.

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