Electret type micro electric field sensor and method, and electric field sensor system and method

Abstract

An electret miniature electric field sensor and method, and an electric field sensor system and method are provided, the electret miniature electric field sensor comprising: a vibration film including a conductive film and an electret film formed on one side surface of the conductive film; a detection electrode forming a capacitor with the conductive film. The vibration film generates electrostatic force under the action of an electric field to generate displacement, capacitance between the conductive film and the detection electrode is caused to change, voltage between the vibration film and the detection electrode is caused to change, and the electric field or the voltage to be measured can be measured by measuring the voltage change or the capacitance change. The electric field sensor does not need to additionally introduce driving voltage, has the advantages of being low in power consumption, capable of achieving alternating-current and direct-current broadband electric field measurement, small in size, simple in structure and beneficial to achieving batch manufacturing and system integration.

Description

technical field [0001] The invention relates to the field of miniature sensors, in particular to an electret type miniature electric field sensor and method, an electric field sensor system and method. Background technique [0002] Electric field sensor is a device used to measure electric field strength, which plays a very important role in meteorological detection, aerospace, industrial production, smart grid, national defense and scientific research. When the electric field sensor is used for actual measurement, the energy consumption, volume, anti-interference and sensitivity of the sensor node must be considered. [0003] According to the different working principles, electric field sensors can be divided into two categories: charge induction type and optical type. The early traditional electric field sensors based on the principle of charge induction, such as double ball type, rotary vane type, etc., the most prominent problem is the large size , the cost is high; wit...

AI Technical Summary

Problems solved by technology

[0003] According to different working principles, electric field sensors can be divided into two categories: charge induction and optical. The early traditional electric field sensors based on the principle of charge induction, such as double ball type, rotary vane type, etc., the most prominent problem is the large size , the cost is relatively high; with the development of micromachining technology, micro electric field sensors based on different principles have been proposed one after another, and most of the micro electric field sensors with excellent performance use an external driving voltage to drive the displacement of the driving structure, and then based on the charge The induction principle realizes the measurement of the electric field or voltage to be measured, which is limited by the working principle, and also brings the disadvantages of high power consumption, insufficient sensitivity, and poor anti-interference ability

Images