Structure and method for representing and inhibiting numerical value of MEMS resonator anchor point damping

Abstract

The invention relates to a structure and a method for representing and inhibiting numerical value of MEMS resonator anchor point damping. The structure comprises suppression areas which are located at the central position of each resonant mass block and are symmetrically distributed; a suppression structure which is used for changing resonance parameters to suppress anchor point dissipation and is arranged in the suppression areas; theoretical fixed point areas which are symmetrically distributed on a support frame for connecting the resonant mass block by taking an anchor point as a center; and a detection structure which is used for carrying out numerical representation on anchor point dissipation to realize detection on asymmetric vibration and is arranged in the theoretical fixed point area. By designing an asymmetric vibration detection structure and an asymmetric vibration suppression structure, real-time measurement characterization and closed-loop suppression of anchor point dissipation are realized. The invention has the characteristics that the processing is easy, the process complexity is not increased, the detection precision is high, the closed-loop suppression effect is good, and the anchor point damping dissipation is effectively reduced.

Description

technical field [0001] The invention relates to the technical field of micro-electromechanical systems, in particular to a structure and method for numerical characterization and suppression of MEMS resonator anchor point damping. Background technique [0002] MEMS (full name Micro Electromechanical System, Micro Electromechanical System) devices, such as Coriolis force gyroscopes, resonant accelerometers, resonators and other structural forms manufactured by MEMS technology, have small size, low power consumption, and high reliability. And low cost and other characteristics, so it has broad application prospects in the fields of industry, national defense, people's livelihood and so on. Regardless of whether it is a MEMS gyroscope, a MEMS resonant accelerometer, or a MEMS resonator, the working state is a resonant state. Low damping, that is, a resonator with a high Q value, has a more concentrated energy transmission channel in the frequency domain, rather than dissipatin...

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Problems solved by technology

However, there is no relevant report on the suppression method of anchor point damping. Anchor point damping refers to the fact that during the vibration process of the resonant structure, its asymmetric vibration will transmit the vibration energy to the outside through the anchor point, resulting in the loss of resonance energy. Lower the Q of the resonant structure

[0004] The main reasons for the asymmetric vibration of the resonant structure are as follows: 1. The designed resonant structure is asymmetrical, and the asymmetrical structural design scheme will cause vibration at the anchor point; 2. The asymmetry caused by the process problem, in the MEMS process Various process steps will lead to process defects, which will make the final structure different from the designed structure, resulting in factors such as damping asymmetry, stiffness asymmetry, mass asymmetry, etc. These factors will cause asymmetric vibration and dissipation through anchor points; 3 1. The accuracy of the excitation signal. The excitation signal directly determines the force of the resonant structure. Since the excitation signal applied by the circuit cannot be completely consistent, even for a fully symmetrical resonant structure, it will also lead to asymmetry of the resonance.

[0005] According to the above analysis, for any design form of resonant structure, there will often be asymmetrical vibrations and damping dissipation through anchor points

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