Integrated high-voltage isolation capacitor and digital capacitance isolator

Abstract

The invention discloses an integrated high-voltage isolation capacitor and a digital capacitor isolator. The integrated high-voltage isolation capacitor comprises a substrate and a semiconductor component, a wiring layer is which positioned at one side of the substrate and the semiconductor component and is provided with a combination part; and an isolation capacitor unit which is located at the side, away from the substrate and the semiconductor component, of the wiring layer, wherein the vertical projection of the isolation capacitor unit on the substrate and the semiconductor component is not overlapped with the vertical projection of the combination part on the substrate and the semiconductor component, and the isolation capacitor unit comprises a lower pole plate, a dielectric structure layer and an upper pole plate arranged in a stacked mode in the direction that the substrate and the semiconductor component point to the wiring layer. The withstand voltage value of the isolation capacitor unit can be adjusted by directly adjusting the thickness of the dielectric structure layer. The thickness of the dielectric structure layer in the integrated high-voltage isolation capacitor does not depend on the number of metal layers in the wiring layers, and isolation capacitor units obtained on the wiring layers with different number of metal layers can have good consistency.

Description

Technical field [0001] Technical Field The present application relates to a digital isolator, and more particularly relates to an integrated high-voltage isolating capacitor and capacitor digital isolators. Background technique [0002] Because digital capacitance isolators data transfer speed, high signal integrity, low power consumption, strong anti-magnetic energy, compatible with standard CMOS (complementary metal oxide semiconductor, complementary metal oxide semiconductor) technology, the advantages of low cost and higher pressure, It has become the mainstream isolator market. [0003] Isolator contains digital capacitance voltage isolation capacitors, the thickness of the withstand voltage characteristics and high voltage isolation dielectric layer capacitance capacitor cells isolated positive correlation. One prior integrated high voltage isolation capacitors thickness of the dielectric layer depends on the process of the wiring layer segments interconnect metal layers, t...

AI Technical Summary

Problems solved by technology

The thickness of the dielectric layer in an existing integrated high-voltage isolation capacitor depends on the number of interconnected metal layers in the back-end process of the wiring layer. The smaller the number of metal layers, the lower the withstand voltage value of the isolation capacitor unit, which cannot be flexibly based on demand Adjust withstand voltage

In another existing integrated high-voltage isolation capacitor, the dielectric layer covers the wiring layer, which increases the difficulty or cost of the process

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