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Film forming equipment and preparation method of organic film layer

A film-forming equipment and organic film technology are applied in the field of film-forming equipment and the preparation of organic film layers, which can solve the problems of requiring a large amount of organic solvents, complicated film-forming processes of organic light-emitting materials, etc., and achieve the effect of good solubility

Active Publication Date: 2022-01-28
WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The invention provides a film-forming device and a method for preparing an organic film layer, which can effectively solve the problems that the current film-forming process of organic light-emitting materials is complex and requires a large amount of organic solvents

Method used

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  • Film forming equipment and preparation method of organic film layer
  • Film forming equipment and preparation method of organic film layer
  • Film forming equipment and preparation method of organic film layer

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Embodiment Construction

[0028] The following will clearly and completely describe the technical solutions in the embodiments of the application with reference to the drawings in the embodiments of the application. Apparently, the described embodiments are only some of the embodiments of the application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of this application. In addition, it should be understood that the specific implementations described here are only used to illustrate and explain the present application, and are not intended to limit the present application. In this application, unless stated to the contrary, the used orientation words such as "up" and "down" usually refer to up and down in the actual use or working state of the device, specifically the direction of the drawing in the drawings ; while "inside" and "outside" refer to the outline of ...

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Abstract

The invention provides film forming equipment and a preparation method of an organic film layer. The film forming equipment comprises: a thermostatic chamber which comprises a first reaction kettle, wherein the first reaction kettle comprises a first gas input end, an organic material input end and a first supercritical fluid output end; and a film forming chamber which comprises a nozzle and a bearing table, wherein the nozzle is communicated with the first supercritical fluid output end. The first gas input end is a channel through which gas enters the first reaction kettle, the organic material input end is a channel through which an organic material enters the first reaction kettle, the first reaction kettle has constant temperature and pressure and is used for converting the gas into supercritical fluid, the supercritical fluid is used for dissolving the organic material, the first supercritical fluid output end is used for conveying the supercritical fluid dissolved with the organic material to the nozzle, and the nozzle is used for spraying out the supercritical fluid dissolved with the organic material so as to form an organic film layer on the bearing table. According to the film forming equipment and the preparation method of the organic film layer, the use of a large amount of organic solvent can be avoided, and the film forming process is simpler.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a film forming device and a method for preparing an organic film layer. Background technique [0002] Organic Light Emitting Diode (OLED) display devices have become the most promising new display devices in recent years due to their advantages of self-illumination, all-solid-state, high contrast, and the like. OLED display devices have many advantages such as low driving voltage, high luminous efficiency, short response time, high definition and contrast, nearly 180° viewing angle, wide operating temperature range, flexible display and large-area full-color display, etc., and are recognized by the industry as It is a display device with the most development potential. [0003] During the preparation process of organic light-emitting materials in organic light-emitting diode display devices, films are mainly formed by evaporation, inkjet printing, etc., but evaporation requires...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/56B05B9/03
CPCB05B9/03H10K71/00
Inventor 曾苏伟
Owner WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD