Denoising model generation method, system, equipment and medium
A model and acquisition module technology, applied in neural learning methods, biological neural network models, image data processing, etc., can solve problems such as insufficient reliability and low efficiency of denoising images, and achieve the effect of improving reliability and efficiency
Pending Publication Date: 2022-02-15
SHANGHAI INTEGRATED CIRCUIT EQUIP & MATERIALS IND INNOVATION CENT CO +1
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[0003] The purpose of the present invention is to provide a denoising model generation method, system, equipment and medium, which solves the problems of low efficiency and insufficient reliability in obtaining denoising images, realizes rapid acquisition of denoising images, and increases the reliability of denoising images
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[0031] In order to make the purpose, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the present invention. Obviously, the described embodiments are part of the present invention Examples, not all examples. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein shall have the usual meanings understood by those skilled in the art to which the present invention belongs. As used herein, "comprising" and similar words mean that the elements or items appearing before the word include the elements or items listed after the word and their equivalents, without excluding other el...
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The invention provides a denoising model generation method, a system,equipment and a medium. The denoising model generation method comprises the following steps: acquiring an SEM image set after wafer photoetching; superposing and averaging pixel values of the SEM images with the same coordinates in the SEM image set, and obtaining a target image set; performing feature extraction on the SEM images in the SEM image set by using a convolutional neural network model to obtain SEM image feature information; obtaining target image feature information of the target image set; and training a convolutional neural network model by using the SEM image feature information and the target image feature information to obtain a denoising model. According to the method, the target image feature information in the target image set is acquired, the convolutional neural network model is trained by using the SEM image feature information and the target image feature information to obtain the denoising model, and the denoising model is used for denoising the SEM image, so that the denoising reliability and efficiency are improved.
Description
technical field [0001] The invention relates to the technical field of semiconductor manufacturing technology, in particular to a method, system, equipment and medium for generating a denoising model. Background technique [0002] In advanced lithography process nodes, the random noise generated by the dispersion of polymer molecules and the distribution of photoacid generators will affect the accuracy of the Optical Proximity Correction (OPC) model. In order to establish an accurate OPC model, multiple measurements are usually made on a selected graphic or key dimension value, and the influence of random noise is reduced by taking the average value, but the measurement and calculation of this method are more complicated and subjective Strong, inefficient, and insufficiently reliable. Contents of the invention [0003] The purpose of the present invention is to provide a denoising model generation method, system, equipment and medium, which solves the problems of low effi...
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IPC IPC(8): G06T7/00G06T5/00G06N3/04G06N3/08
CPCG06T7/0004G06N3/08G06T2207/20081G06T2207/20084G06T2207/30148G06N3/045G06T5/70
Inventor 燕燕时雪龙周涛许博闻
Owner SHANGHAI INTEGRATED CIRCUIT EQUIP & MATERIALS IND INNOVATION CENT CO