Balanced micro force value loading device and method based on comb capacitor

Abstract

The invention discloses a balanced micro force value loading device and method based on a comb capacitor and belongs to the technical field of precision measurement. The device comprises a data acquisition and control module, a voltage adjustment module, a piezoelectric ceramic driving module, an electrostatic force balance type pressure head and a capacitance reading module, wherein the electrostatic force balance type pressure head is used for realizing micro force value loading and is mainly composed of a piezoelectric ceramic pile, fixed comb teeth, suspension comb teeth, a conduction rod, a pressure needle and an elastic supporting beam. According to the device, an output capacitance value of the comb capacitor is kept unchanged, the piezoelectric ceramic is utilized to drive a fixed end of the comb capacitor to generate displacement perpendicular to the press-in direction, and the electrostatic force is changed by adjusting the voltage of the comb capacitor, so elastic supporting of the suspension comb of the comb capacitor is always in an initial state; the added electrostatic force is directly converted into the loading force, so nonlinearity of the loading force introduced by the deformation of the elastic supporting beam is eliminated, and high-precision controllable loading is realized.

Description

technical field [0001] The present invention relates to a balanced micro-force loading device and method based on comb-tooth capacitors, in particular to a device and method for changing the electrostatic force by adjusting the comb-tooth capacitor voltage to achieve force balance on the indenter and finally realize micro-force loading. It belongs to the technical field of precision measurement. Background technique [0002] Nano-indentation technology, also known as depth-sensitive indentation technology, is a micro-scale mechanical measurement technology for measuring mechanical properties such as elastic modulus and hardness of materials. Depth obtains the load-displacement curve for the material. A common nanoindenter generally consists of a loading unit for nanoindentation, a displacement sensor for measuring the indentation depth, a diamond indenter and a control system. The indentation test method is: the indenter presses the indenter into the object under test acco...

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Problems solved by technology

[0004] In order to solve the problem in the prior art that the elastic force leads to large nonlinearity, which makes the output of the loading force inaccurate, the purpose of the present invention is to provide a balanced micro-force loading device based on a comb-tooth capacitance and a comb-tooth-based The balanced micro-force loading method of the capacitor keeps the output capacitance value of the comb-tooth capacitor unchanged, and uses piezoelectric ceramics to drive the fixed end of the comb-tooth capacitor to produce a displacement perpendicular to the direction of pressing. Electricity, so that the elastic support of the comb capacitor suspension comb is always in the initial state. When the indenter reaches the force balance again, the increased electrostatic force is directly converted into the loading force, thereby eliminating the impact of the loading force introduced by the deformation of the elastic support beam. Non-linear for high precision and controllable loading

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