Comb tooth gap adjustable MEMS accelerometer

Abstract

The invention provides a comb tooth gap adjustable MEMS accelerometer which comprises a substrate layer. A device layer is arranged on the substrate layer. A positive detection unit and a negative detection unit are arranged on the device layer. A plurality of comb tooth gap adjusting devices are arranged in the positive detection unit and the negative detection unit. The positive detection unit and the negative detection unit are oppositely arranged. A movable mass block is arranged between the positive detection unit and the negative detection unit, a positive force balance unit and a negative force balance unit are arranged on the movable mass block, and the positive force balance unit and the negative force balance unit are arranged in parallel. Through the innovative design of the comb tooth gap adjustable MEMS accelerometer, the problems of structural gap deviation, mismatch, poor processing consistency and the like caused by process manufacturing can be compensated, so that zero offset of device design indexes is ensured, the stability and the consistency of the device indexes are enhanced, meanwhile, the sensitivity and the resolution ratio of the device are improved, and the performance of the MEMS accelerometer is optimized.

Description

technical field [0001] The invention relates to the technical field of MEMS accelerometers, in particular to a comb-gap adjustable MEMS accelerometer. Background technique [0002] MEMS accelerometer is a device used to detect acceleration. It is one of the representatives of MEMS inertial sensors. It involves electronics, machinery, materials, physics, chemistry and other disciplines and technologies. It is a research hotspot at home and abroad. Accelerometers have the advantages of high stability, high sensitivity and high resolution, and have broad application prospects in industrial control, unmanned aerial vehicles, inertial navigation, aerospace and other fields. [0003] With the development of MEMS manufacturing technology, the current manufacturing level of MEMS accelerometers has been significantly improved, but the current processing of sensing structures still generally faces a series of manufacturing problems such as serious structure over-etching, large gap pro...

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Problems solved by technology

[0003] With the development of MEMS manufacturing technology, the current manufacturing level of MEMS accelerometers has been significantly improved, but the current processing of sensing structures still generally faces a series of manufacturing problems such as serious structure over-etching, large gap processing deviation, and poor process consistency. The structural mismatch of the MEMS accelerometer causes the key indicators of the device to deviate from the design value, the consistency is poor, the sensitivity is reduced, and the resolution is deteriorated.

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