A mems accelerometer with adjustable comb gap

Abstract

The invention provides a MEMS accelerometer with adjustable comb gap, comprising: a substrate layer, a device layer is arranged on the substrate layer, a positive detection unit and a negative detection unit are arranged on the device layer, and the positive detection unit A plurality of comb tooth gap adjustment devices are arranged in the negative detection unit, the positive detection unit and the negative detection unit are arranged oppositely, a movable mass block is arranged between the positive detection unit and the negative detection unit, and the movable mass A positive force balance unit and a negative force balance unit are arranged on the block, and the positive force balance unit and the negative force balance unit are arranged in parallel; the present invention can realize compensation due to process manufacturing through the innovative design of the MEMS accelerometer with adjustable comb gap. Problems such as structural gap deviation, mismatch, and poor processing consistency ensure the zero offset of the device design index, enhance the stability and consistency of the device index, improve the sensitivity and resolution of the device, and optimize the MEMS acceleration. meter performance.

Description

technical field [0001] The invention relates to the technical field of MEMS accelerometers, in particular to a comb-gap adjustable MEMS accelerometer. Background technique [0002] MEMS accelerometer is a device used to detect acceleration. It is one of the representatives of MEMS inertial sensors. It involves electronics, machinery, materials, physics, chemistry and other disciplines and technologies. It is a research hotspot at home and abroad. Accelerometers have the advantages of high stability, high sensitivity and high resolution, and have broad application prospects in industrial control, unmanned aerial vehicles, inertial navigation, aerospace and other fields. [0003] With the development of MEMS manufacturing technology, the current manufacturing level of MEMS accelerometers has been significantly improved, but the current processing of sensing structures still generally faces a series of manufacturing problems such as serious structure over-etching, large gap pro...

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Problems solved by technology

[0003] With the development of MEMS manufacturing technology, the current manufacturing level of MEMS accelerometers has been significantly improved, but the current processing of sensing structures still generally faces a series of manufacturing problems such as serious structure over-etching, large gap processing deviation, and poor process consistency. The structural mismatch of the MEMS accelerometer causes the key indicators of the device to deviate from the design value, the consistency is poor, the sensitivity is reduced, and the resolution is deteriorated.

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