Online graphite boat warped piece detection device and detection method

A detection device, graphite boat technology, applied to measuring devices, material analysis through optical means, instruments, etc., can solve the problems of damage and pollution of graphite boats and silicon wafers, poor reliability and timeliness of manual detection, and affect the beat, etc., to achieve Improve the working rhythm, high degree of automation, and high detection reliability

Pending Publication Date: 2022-03-04
HUNAN RED SUN PHOTOELECTRICITY SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] 1) The graphite boat needs to be taken out before manual inspection, and the graphite boat should be returned after the inspection is completed, which is time-consuming and laborious, and is easy to cause damage and pollution to the graphite boat and silicon wafer
[0005] 2) The reliability and timeliness of manual detection is poor
[0006] 3) If there is a warped piece during the inspection when entering and exiting the boat, the graphite boat needs to be completely withdrawn again for processing, which will affect the beat

Method used

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  • Online graphite boat warped piece detection device and detection method
  • Online graphite boat warped piece detection device and detection method
  • Online graphite boat warped piece detection device and detection method

Examples

Experimental program
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Embodiment 1

[0043] like Figure 1 to Figure 5 As shown, the online graphite boat warping sheet detection device of the present embodiment includes a frame 1, a graphite boat longitudinal transmission mechanism 2, a graphite boat transverse transmission mechanism 3, a detection element 4 and a detection longitudinal movement mechanism 5, and a graphite boat transverse transmission mechanism 3 Located at the bottom of the frame 1, the graphite boat longitudinal transmission mechanism 2 is arranged on the graphite boat horizontal transmission mechanism 3, the graphite boat longitudinal transmission mechanism 2 is used to drive the graphite boat 6 to move longitudinally, and the graphite boat horizontal transmission mechanism 3 is used to drive the graphite boat The longitudinal transmission mechanism 2 moves laterally, and the detection longitudinal movement mechanism 5 is arranged on the frame 1 and above the graphite boat transverse transmission mechanism 3, and the detection longitudinal m...

Embodiment 2

[0063] like Image 6 As shown, the online graphite boat warped sheet detection device of the present embodiment only differs from Embodiment 1 in that:

[0064] In this embodiment, two graphite boat vertical transmission mechanisms 2 are provided, and the two graphite boat vertical transmission mechanisms 2 are respectively arranged on the graphite boat horizontal transmission mechanism 3 so as to be movable laterally. For ease of distinction, the two graphite boat longitudinal transport mechanisms 2 are marked as 2a and 2b respectively, and the graphite boats 6 on the two graphite boat longitudinal transport mechanisms 2 are marked as 6a and 6b respectively. All the other structures are consistent with Example 1.

[0065] The detection method of the on-line graphite boat warp detection device of the present embodiment may further comprise the steps:

[0066] S1. The first graphite boat 6a output by the upstream equipment outlet is transmitted to a graphite boat longitudinal...

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Abstract

The invention discloses an online graphite boat fin detection device and method, and the device comprises a rack, a graphite boat longitudinal transmission mechanism, a graphite boat transverse transmission mechanism, a detection element, and a detection longitudinal movement mechanism. The graphite boat longitudinal transmission mechanism is arranged on the graphite boat transverse transmission mechanism, the graphite boat longitudinal transmission mechanism is used for driving the graphite boat to move longitudinally, the graphite boat transverse transmission mechanism is used for driving the graphite boat longitudinal transmission mechanism to move transversely, and the detection longitudinal movement mechanism is arranged on the rack and located above the graphite boat transverse transmission mechanism. The detection longitudinal movement mechanism is used for driving the detection element to move longitudinally. According to the invention, the silicon wafers in the graphite boat are automatically detected through the detection element, the graphite boat does not need to be manually subjected to warped wafer detection, the automation degree is high, the efficiency is higher, the detection reliability is higher, pollution and fragments caused by manual contact are reduced, and the operation cost of equipment is saved.

Description

technical field [0001] The invention relates to photovoltaic equipment, in particular to an online graphite boat warp detection device and detection method. Background technique [0002] During the manufacturing process of photovoltaic solar cells, it is usually necessary to use graphite boats to load silicon wafers and perform corresponding processes on silicon wafers, such as coating the front or back of silicon wafers. During the process, a graphite boat is needed as a carrier. Before the process, the silicon wafers from the previous process are taken out of the flower basket box and put into the boat slots of the graphite boat, and a silicon wafer is placed in each boat slot; After the placement is completed, send the graphite boat into the reaction chamber of the process equipment to carry out the process; take out the graphite boat after the process is over, and after the quartz boat is cooled, take out the processed silicon wafer from the quartz boat, put it into the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/84G01N21/01
CPCG01N21/84G01N21/01G01N2021/8411G01N2021/845G01N2021/0112
Inventor 代威李祥辉
Owner HUNAN RED SUN PHOTOELECTRICITY SCI & TECH
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