Low-pressure corrosion device and method for quartz microwell plate

Abstract

The invention discloses a low-pressure corrosion method for a quartz microwell plate, and belongs to the field of processing technologies. When the size of micropores in the quartz micropore plate is smaller than the required size, a corrosion reaming method is provided. According to the method, the purpose of enlarging the micropore diameter is achieved by corroding the quartz plate through the corrosion solution, and due to the fact that bubbles exist in the corrosion solution, uneven corrosion can be caused, the low-pressure corrosion method is provided, the number of the bubbles in the solution can be reduced, and the corrosion rate of the quartz micropore plate is more balanced. The device for manufacturing the low pressure is composed of a vacuum air pump, a first solution cup, a second solution cup, a corrosion cup, a corrosion solution, several air valves and a connecting guide pipe, the corrosion cup can be pumped to be close to vacuum through specific operation steps, bubbles are separated out, and uniform corrosion of the solution to the microwell plate is facilitated.

Description

technical field [0001] The invention relates to the field of processing technology, in particular to a low-pressure etching device and method for a quartz microporous plate. Background technique [0002] In some special applications, quartz microplates with a large number of pores are required. During the actual processing of quartz microwell plates, due to factors such as excessive manufacturing errors or unreasonable design, the diameter of micropores on the actual plate may be slightly smaller than required. In this case reprocessing will consume a lot of cost and time. For the expansion of a large number of quartz micropores, the method of solution corrosion can be used. However, during the corrosion process of the microporous plate, the corrosion solution precipitates microbubbles due to heating, agitation, etc., and easily attaches to the micropores, so that the quartz there will not come into contact with the corrosion solution, which will cause the corrosion rate o...

AI Technical Summary

Problems solved by technology

However, during the corrosion process of the microporous plate, the corrosion solution precipitates microbubbles due to heating, agitation, etc., and easily attaches to the micropores, so that the quartz there will not come into contact with the corrosion solution, which will cause the corrosion rate of each micropore to be different. , and a single micropore will also be uneven

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