Fast flushing and quick discharge tank for integrated circulation cooling and cleaning of semiconductor wafers

A cyclic cooling, semiconductor technology, applied in the field of semiconductor wafer processing, fast flushing and fast slotting, can solve the problems of surface residue, damage, uneven cleaning, etc., to achieve the effect of cleaning the wafer thoroughly and avoiding damage
CN114267616BActive Publication Date: 2022-05-17ZHICHENG SEMICON EQUIP TECH (KUNSHAN) CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
ZHICHENG SEMICON EQUIP TECH (KUNSHAN) CO LTD
Publication Date
2022-05-17

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Abstract

The invention provides a fast flushing and quick discharge tank for integrated circulation cooling and cleaning of semiconductor wafers, and relates to the technical field of semiconductor wafer cleaning. The quick-flushing and quick-discharging tank used for integrated circulation cooling and cleaning of semiconductor wafers includes a cleaning tank, a cover plate is rotatably connected to the outside of the cleaning tank, sliding frames are fixedly connected to both sides of the inner wall of the cleaning tank, and the two A fixed plate is provided between the sliding frames and is slidably connected with the fixed plate. The fast-flushing and quick-discharging groove used for the integrated circulation cooling and cleaning of the semiconductor wafer, because the first rack is arranged inside the placement groove, the second gear pushes the second gear. One rack, so that the splints fixedly connected at one end of multiple first racks can clamp and fix the wafer, which is beneficial to quickly fix multiple wafers, reduce the contact with the wafer, and avoid the blocking caused by fixing during cleaning, which affects cleaning Efficiency, at the same time, the wafer is fixed to avoid damage to the wafer caused by shaking during cleaning.
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Description

Technical field

[0001] The present invention relates to a semiconductor wafer processing technology, specifically for semiconductor wafer integrated circulation cooling cleaning of fast-punch fast-rushing fast grooves, belonging to the field of semiconductor wafer cleaning technology. Background

[0002] Semiconductor materials are the cornerstone of the modern semiconductor industry and the microelectronics industry. From a physical point of view, it refers to a type of material with electrical conductivity between conductors and insulators. There are many kinds of semiconductor materials, which can be roughly divided into three types: inorganic semiconductor crystals, organic semiconductor materials and amorphous semiconductors. At present, amorphous semiconductor materials have great application prospects in solar cells. But from the overall point of view, inorganic semiconductor crystals still dominate in semiconductor materials.

[0003] Semiconductor wafer before and after...

Claims

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