Clamp, crystal bar grabbing device and single crystal furnace

A grasping device and fixture technology, applied in the field of single crystal furnaces, can solve the problem of inconvenience of taking rods in the single crystal furnace, and achieve the effects of improving convenience, convenient rod taking, and prolonging service life

Pending Publication Date: 2022-04-05
ZHEJIANG JINGSHENG MECHANICAL & ELECTRICAL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] This application provides a fixture, a crystal ingot grabbing device and a single crystal furnace, which solves the technical problem of inconvenient removal of rods from large-size single crystal furnaces in the prior art, and achieves the technical effect of facilitating the removal of rods from large-size single crystal furnaces

Method used

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  • Clamp, crystal bar grabbing device and single crystal furnace
  • Clamp, crystal bar grabbing device and single crystal furnace
  • Clamp, crystal bar grabbing device and single crystal furnace

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Embodiment Construction

[0064] The serial numbers assigned to components in this document, such as "first", "second", etc., are only used to distinguish the described objects and do not have any sequence or technical meaning. The "connection" and "connection" mentioned in this application include direct and indirect connection (connection) unless otherwise specified. In the description of this application, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", The orientation or positional relationship indicated by "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the application and simplifying the description , rather than indicating or implying that the device or element referred to must have a particular orientation, be constructed and operate in a particular orientation, and thus should not...

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Abstract

The invention relates to the technical field of single crystal furnaces, in particular to a clamp which comprises a base and a base fixing part. The number of the clamping blocks is two, the two clamping blocks are oppositely arranged, a clamping space is formed between the two clamping blocks, at least one clamping block is connected to the base in a sliding mode, and the sliding direction is parallel to the arrangement direction of the two clamping blocks; and the driving assembly is fixed on the base and acts on the clamping block capable of sliding. The crystal bar clamping device has the beneficial technical effects that the clamping blocks are slidably connected to the base, the adjusting blocks are connected with the clamping blocks through the connecting rods, the two ends of the connecting rods are rotationally connected with the adjusting blocks and the clamping blocks correspondingly, and by driving the positions of the adjusting blocks relative to the base, clamping or releasing of a crystal bar by the two clamping blocks is achieved; the technical problem that in the prior art, rod taking of a large-size single crystal furnace is inconvenient is solved, and the technical effect that rod taking of the large-size single crystal furnace is convenient is achieved.

Description

technical field [0001] The present application relates to the technical field of single crystal furnaces, in particular to a fixture, a crystal rod grabbing device and a single crystal furnace. Background technique [0002] Czochralski silicon single crystal technology is currently the mainstream technology for producing semiconductor silicon single crystals. The crucible is melted at high temperature, and then a dislocation-free single crystal silicon rod is slowly grown by pulling. [0003] In the prior art, a single crystal furnace includes a main furnace chamber and an auxiliary furnace chamber. The single crystal silicon rods are grown from the main furnace chamber and then pulled into the auxiliary furnace chamber. After the crystal pulling is completed, the auxiliary furnace needs to be lifted and rotated. After the chamber, the single crystal silicon rod is taken out. With the advancement of this crystal growth technology and the requirements of the market, the dia...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B29/06C30B15/30
Inventor 叶钢飞曹建伟傅林坚朱亮倪军夫梁晋辉叶雷江
Owner ZHEJIANG JINGSHENG MECHANICAL & ELECTRICAL
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