Micromechanical detection structure capable of preventing electrostatic attraction

Abstract

The invention provides a micro-mechanical detection structure for preventing electrostatic attraction, which belongs to the technical field of micro-electro-mechanical systems and comprises a fixed anchor point, fixed comb teeth connected to the fixed anchor point, a movable mass block and movable comb teeth connected to the movable mass block. The movable comb teeth and the fixed comb teeth intersect with each other, when sensitive signals are input, the movable mass block deviates from the balance position, and capacitance difference is formed between the movable comb teeth and the fixed comb teeth. Wherein the fixed comb teeth or / and the movable comb teeth are provided with comb tooth anti-static attraction structures so as to limit the offset of the movable comb teeth and avoid failure of static attraction between the comb teeth. The micro-mechanical detection structure for preventing electrostatic attraction can effectively prevent electrostatic attraction failure caused by overload signals, has the advantages of being simple in structural form, convenient to machine and the like, and can remarkably improve the reliability of an MEMS inertial sensor.

Description

technical field [0001] The invention belongs to the technical field of micro-electro-mechanical systems, and in particular relates to a micro-mechanical detection structure for preventing electrostatic attraction. Background technique [0002] MEMS (Micro-Electro-Mechanical System, Micro-Electro-Mechanical System) inertial sensors are devices for inertial motion of sensitive objects, including accelerometers and gyroscopes. MEMS inertial sensors are mainly used to detect and measure acceleration, tilt, shock, vibration, rotation and Multi-degree-of-freedom motion is an important component to solve navigation, orientation and motion carrier control. Due to the use of silicon MEMS processing technology, MEMS inertial sensors have the advantages of small size, light weight, high reliability, low power consumption, low cost, and mass production, and are widely used in aerospace, automotive industry, consumer electronics and weapons and other fields. [0003] MEMS inertial sens...

AI Technical Summary

Problems solved by technology

[0006] (2) The electrostatic force is attracted between the movable comb teeth 5 and the fixed comb teeth 7. At this time, the electrostatic force generated between the comb teeth is greater than the restoring force provided by the elastic support beam 1, so that the movable comb teeth 5 cannot return to the equilibrium position, such as image 3 as shown in (b)

At present, apart from a reasonable design structure, there is no particularly effective method to prevent the failure of electrostatic force

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