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Surface acoustic wave resonator

A surface acoustic wave and resonator technology, which is applied in the field of microelectronic devices, can solve problems such as energy loss and reduce device quality factors, and achieve the effect of improving quality factors and suppressing diffraction effects

Pending Publication Date: 2022-04-12
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the interdigitated electrode structure of the surface acoustic wave resonator in the prior art is formed by repeating a pair of electrode pairs, so that the diffraction effect of the excited surface acoustic wave will cause energy loss and reduce the quality factor Q of the device.

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Embodiment Construction

[0044] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Apparently, the described embodiments are only some of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of this application.

[0045] Reference herein to "one embodiment" or "an embodiment" refers to a specific feature, structure or characteristic that may be included in at least one implementation of the present application. In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "top", "bottom" etc. is based on the orientation or positional relationship shown in the drawings, and is only for It ...

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Abstract

The invention relates to the technical field of microelectronic devices, and provides a surface acoustic wave resonator. The surface acoustic wave resonator comprises a supporting substrate, a piezoelectric film, an interdigital transducer and two reflecting grating units which are sequentially stacked from bottom to top, a reflecting grating unit is arranged on each of the two sides of the interdigital transducer; therefore, when the resonator is in a working mode, quasi standing waves can be formed in the piezoelectric film area. And the interdigital transducer comprises an interdigital electrode region, the interdigital electrode region comprises interdigital electrode pairs, and the sizes of the interdigital electrodes can be subsequently adjusted, so that the Fresnel region of each interdigital electrode pair can comprise the whole resonator, the effect of suppressing the diffraction effect is realized, and the quality factor of the device is improved.

Description

technical field [0001] The invention relates to the technical field of microelectronic devices, in particular to a surface acoustic wave resonator. Background technique [0002] In general, surface acoustic wave resonators can utilize plate wave modes with high sound velocity and large electromechanical coupling coefficient in piezoelectric thin plates, and can prepare high-frequency and wide-bandwidth acoustic filters, so they have received extensive attention. However, the interdigitated electrode structure of the surface acoustic wave resonator in the prior art is formed by repeatedly arranging a pair of electrode pairs, so that the diffraction effect of the excited surface acoustic wave will cause energy loss and reduce the quality factor Q of the device. Contents of the invention [0003] The invention aims to solve the technical problem of the diffraction effect of the surface acoustic wave in the surface acoustic wave resonator in the prior art. [0004] In order t...

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Application Information

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IPC IPC(8): H03H9/145H03H9/02H03H9/25
Inventor 欧欣姚虎林张师斌
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI