Three-degree-of-freedom position measuring device and method for Y-shaped magnetic levitation planar motor rotor

Abstract

The invention discloses a three-degree-of-freedom position measuring device and method for a Y-shaped magnetic levitation planar motor rotor, and belongs to the technical field of magnetic levitation planar motors, the device comprises three linear Hall sensor groups, a stator and a rotor of a Y-shaped magnetic levitation planar motor, the rotor is suspended at a preset height above the stator, and the linear Hall sensor groups are connected with the stator and the rotor. Three linear Hall sensor groups are arranged below preset positions of geometric centers of three exciting winding coils on a stator, each linear Hall sensor group comprises two linear Hall sensors, and the distance between the two linear Hall sensors is equal to the width of magnetic steel in a Halbach magnetic steel array in a rotor. And the phase angle difference between each Halbach magnetic steel array in the rotor and the corresponding linear Hall sensor group is 90 degrees. The device is simple in structure, the cost is greatly reduced, additional devices such as a reading head, a reflecting mirror or an aluminum plate do not need to be installed on the motor rotor, and the motion performance of the planar motor is not affected.

Description

technical field [0001] The invention relates to the technical field of magnetic levitation planar motors, in particular to a three-degree-of-freedom position measuring device and method for a mover plane of a Y-type moving magnet type magnetic levitation planar motor. Background technique [0002] During the operation of the magnetic levitation planar motor, it is necessary to measure the current mover position in real time for motion control. This measurement process includes the acquisition and signal processing of sensor signals and the calculation process of the motor mover position. It needs to be selected according to the motion performance index of the motor. Appropriate measuring methods and measuring devices. Y-type maglev planar motor has the characteristics of small motion range, simple structure and motion control algorithm, and is suitable for performance verification tests of maglev motion platforms. In general applications, laser sensors or eddy current sensor...

AI Technical Summary

Problems solved by technology

Related technical solution 21 discloses a three-degree-of-freedom position measurement method for a large-area maglev planar motor mover. This method uses an absolute grating and an eddy current sensor at the same time. Two absolute gratings are set in the X and Y directions. Two eddy current sensors are installed in the Y direction, which realizes the position measurement of the large stroke and high precision mover, but the price of the absolute grating ruler is relatively high, and the reading head needs to be installed on the motor mover, which has direct contact with the motor mover, which destroys the The dynamic model of the maglev planar motor also has the problem of anti-interference of the eddy current sensor

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