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Piezoelectric micromechanical ultrasonic transducer with reduced free oscillation

An ultrasonic transducer and micro-machine technology, applied in the field of micro-electromechanical systems, can solve problems such as increasing the bandwidth of PMUT equipment

Active Publication Date: 2022-04-22
STMICROELECTRONICS SRL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010]In order to solve these problems and improve the performance of echo detection, it is necessary to increase the "blind area" of PMUT, that is, the spatial area where echo overcomes ringing, thereby increasing the bandwidth of PMUT equipment

Method used

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  • Piezoelectric micromechanical ultrasonic transducer with reduced free oscillation
  • Piezoelectric micromechanical ultrasonic transducer with reduced free oscillation
  • Piezoelectric micromechanical ultrasonic transducer with reduced free oscillation

Examples

Experimental program
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Embodiment Construction

[0060] figure 1 A cross-sectional view of a PMUT device, generally identified with reference numeral 100, according to an embodiment of the present disclosure is schematically shown.

[0061] In the following description of this specification, directional terms (e.g., top, bottom, higher, lower, side, center longitudinal, transverse, vertical) will only be used to describe the PMUT in relation to the very specific orientation shown in the figure The device 100 is not used to describe the possible specific orientations that the PMUT device 100 will have during its operation.

[0062] In this respect, a reference direction system comprising three orthogonal directions X, Y, Z is shown.

[0063] According to an embodiment of the present disclosure, the PMUT device 100 has a circular (or substantially circular) shape (along a plane parallel to directions Y and Z). According to other (not shown) embodiments of the present disclosure, PMUT device 100 has different shapes, such as ...

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PUM

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Abstract

A piezoelectric micromachined ultrasonic transducer that reduces free oscillation is disclosed. A PMUT apparatus includes a membrane element adapted to generate and receive ultrasonic waves by oscillating around an equilibrium position at respective resonant frequencies. The piezoelectric element is located above the membrane element in the first direction and is configured to oscillate the membrane element when an electrical signal is applied to the piezoelectric element, and to generate the electrical signal in response to the oscillation of the membrane element. The damper is configured to reduce free oscillation of the membrane element, and the damper includes a damper cavity surrounding the membrane element, and a polymeric member, at least a portion of which is above the damper cavity in a first direction.

Description

technical field [0001] The present disclosure relates to the field of microelectromechanical systems (hereinafter referred to as "MEMS"). In particular, the present disclosure relates to piezoelectric micromachined ultrasound transducers (hereinafter "PMUTs"). Background technique [0002] MEMS devices include miniaturized mechanical, electrical and / or electronic components integrated in the same semiconductor material substrate (eg silicon) by micromechanical techniques (eg photolithography, deposition, etching, deposition, growth). [0003] A micromachined ultrasonic transducer device (hereinafter referred to as "MUT device") is a MEMS device suitable for transmitting / receiving ultrasonic waves with a frequency above 20 kHz. Among known MUT devices, piezoelectric MUT devices (hereinafter referred to as "PMUT devices") are known. A PMUT device is a type of MUT device whose operation is based on the bending motion of one or more membrane elements mechanically coupled to a ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B06B1/06H10N30/20H10N30/30
CPCB06B1/0662B06B1/0681B06B1/0622B06B1/0666B06B1/0674B06B1/0651H10N30/101H10N30/704B81B3/0021B81B7/0016B81C1/00158H10N30/308H10N30/2047
Inventor D·朱斯蒂M·费雷拉F·夸利亚
Owner STMICROELECTRONICS SRL