Transducer
A technology of transducers and vibrating membranes, which is applied to transducer circuits, loudspeaker transducer fixation, piezoelectric/electrostrictive transducers, etc. It can solve the problems of large driving voltage and high power consumption, and achieve the purpose of suppressing damage Effect
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no. 1 approach
[0072] refer to figure 1 and figure 2 The structure of the transducer 1 of this embodiment will be described. The transducer 1 of the present embodiment includes an acoustic chip 5 , a package 60 , external electrodes 70 , and contact pads 80 in a main body. In the description below, the figure 1 The state of the transducer 1 shown defines an up-down direction as a reference, but not an absolute direction with respect to the transducer 1 .
[0073] exist image 3 and Figure 4 Among them, the acoustic chip 5 is composed of a piezoelectric element 10 and a film body 15 .
[0074] The piezoelectric element 10 is composed of a pair of electrodes 11 , 12 and a piezoelectric film 13 sandwiched between the pair of electrodes 11 , 12 . The pair of electrodes 11, 12 and the piezoelectric film 13 have shapes corresponding to the shape of the vibrating film 16 described later. image 3 and Figure 4 The example shown has a circular shape.
[0075] Each of the electrodes 11 and...
no. 2 approach
[0134] refer to Figure 12 to Figure 14B , the structure of the transducer 1 of this embodiment will be described. The transducer 1 of the present embodiment comprises a piezoelectric element 10 and a film body 15 in a main body. In the description below, the Figure 13 The state of the transducer 1 shown is a reference to define the up-down direction, but does not limit the direction in which the transducer 1 is used.
[0135] The piezoelectric element 10 is composed of a pair of electrodes 11 , 12 and a piezoelectric film 13 sandwiched between the pair of electrodes 11 , 12 . The pair of electrodes 11, 12 and the piezoelectric film 13 have shapes corresponding to the shape of the vibrating film 16 described later, Figure 12 to Figure 13 The example shown in B has a quadrilateral shape.
[0136] Each of the pair of electrodes 11 and 12 is formed of a thin film of conductive metal such as aluminum or copper, for example. One electrode 11 is located above the piezoelectri...
no. 3 approach
[0156] refer to Figure 15 The transducer 1 of this embodiment will be described. The transducer 1 of the present embodiment differs from the transducer 1 of the second embodiment in the structure of the piezoelectric element 10 . The description of the contents overlapping with the second embodiment will be omitted, and the following description will focus on the differences.
[0157] The piezoelectric element 10 has a piezoelectric slit 14 penetrating through the piezoelectric element 10 in the thickness direction. A piezoelectric gap 14 is provided for each vibration region 300 . Specifically, the piezoelectric slit 14 extends from the planar portion 17 a to the dividing slit 2 (main slit portion 2 a ) along the vertical direction of the planar portion 17 a. Each vibration region 300 is divided into a plurality of small regions by the piezoelectric gap 14 . Moreover, each small area is discontinuous in the direction (horizontal direction) parallel to the planar portion ...
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