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Laminate manufacturing apparatus and laminate manufacturing method

A manufacturing method and laminated body technology, which is applied in lamination devices, semiconductor/solid-state device manufacturing, identification devices, etc., can solve problems such as damage, brittleness, and difficulty in peeling, and achieve the effect of uniform control

Pending Publication Date: 2022-04-29
TOYOBO CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the polymer film obtained by such a method is prone to brittle cracks, and the functional elements formed on the surface of the polymer film are often damaged when peeled off from the support.
In particular, it is extremely difficult to peel a large area of ​​film from the support, and it is impossible to obtain an industrially feasible yield

Method used

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  • Laminate manufacturing apparatus and laminate manufacturing method
  • Laminate manufacturing apparatus and laminate manufacturing method
  • Laminate manufacturing apparatus and laminate manufacturing method

Examples

Experimental program
Comparison scheme
Effect test

no. 1 Embodiment approach

[0078] The laminate manufacturing apparatus according to the first embodiment has the following configuration.

[0079] (1) A laminate manufacturing device comprising:

[0080] An inorganic substrate transfer device for transferring inorganic substrates;

[0081] And a water supply device for supplying an aqueous medium to the surface of the inorganic substrate coated with the silane coupling agent, and / or the surface of the heat-resistant polymer film coated with the silane coupling agent;

[0082] And a laminating device for laminating the first sheet and the second sheet after supplying the aqueous medium.

[0083] (2) The laminated body manufacturing apparatus as described in (1) which has the coating apparatus which apply|coats a silane coupling agent to an inorganic board|substrate.

[0084] (3) The laminate manufacturing apparatus according to (1) or (2), comprising an inorganic substrate cleaning device for cleaning the inorganic substrate before supplying the aqueou...

no. 2 Embodiment approach

[0218] The laminate roll manufacturing apparatus according to the second embodiment has the following configuration.

[0219] (1) A laminated body roll manufacturing apparatus having:

[0220] Metal foil handling devices for handling metal foil;

[0221] And a water supply device for supplying an aqueous medium to the surface of the metal foil coated with the silane coupling agent, and / or the surface of the heat-resistant polymer film coated with the silane coupling agent;

[0222] And a roll lamination device that bonds metal foil and heat-resistant polymer film after one or both of them are supplied with an aqueous medium.

[0223] (2) The laminated body roll manufacturing apparatus as described in (1) which has the coating apparatus which apply|coats a silane coupling agent to metal foil.

[0224] (3) The laminated body roll manufacturing apparatus as described in (1) or (2), which has the metal foil washing|cleaning apparatus which washes the metal foil before supplying ...

no. 3 Embodiment approach

[0293] The heat-resistant polymer film laminate manufacturing apparatus according to the third embodiment has the following configuration.

[0294] (1) An apparatus for manufacturing a heat-resistant polymer film laminate, comprising:

[0295] A film transfer device for transferring the first heat-resistant polymer film;

[0296] And a water supply device for supplying an aqueous medium to the surface of the first heat-resistant polymer film coated with the silane coupling agent, and / or the surface of the second heat-resistant polymer film coated with the silane coupling agent;

[0297] After supplying an aqueous medium to one or both of the first heat-resistant polymer film and the second heat-resistant polymer film, the first heat-resistant polymer film and the second heat-resistant polymer film are laminated. laminating device.

[0298] (2) The apparatus for producing a heat-resistant polymer film laminate according to (1), comprising a coating device for applying a silan...

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Abstract

A laminate manufacturing device is provided with a first sheet conveyance device for conveying a first sheet, a water supply device for supplying an aqueous medium to the surface of the first sheet coated with a silane coupling agent and / or the surface of a second sheet coated with a silane coupling agent, and a lamination device for bonding the first sheet to which the aqueous medium has been supplied and the second sheet.

Description

technical field [0001] The present invention relates to a laminate manufacturing device and a laminate manufacturing method. Background technique [0002] In recent years, for the purpose of weight reduction, miniaturization and / or thinning, and flexibility of functional elements such as semiconductor elements, MEMS elements, and display elements, technological development of forming such elements on polymer films has been actively carried out. That is, as materials for base materials of electronic components such as information communication equipment (playback equipment, mobile radio, portable communication equipment, etc.), radar, and high-speed information processing devices, materials that have heat resistance and can cope with the signal frequency band of information communication equipment have been used in the past. High-frequency ceramics (reaching the GHz band), but ceramics are not flexible, and it is difficult to reduce the thickness, which has the disadvantage o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B32B37/10B32B37/00B32B38/16B29C63/02B29C65/48H01L21/02C08J5/12C08J5/18C08J7/043C08J7/12
CPCB32B37/10B32B37/00B32B38/162B29C63/02B29C65/48H01L21/02112H01L21/02225C08J5/18C08J7/12C08J5/12C08J7/043B32B2037/243H01L21/02118H01L21/0226H01L21/02299H01L21/6776H01L21/67051H01L21/6715B32B37/12B32B37/0038B32B2457/14B32B17/10B32B27/281B29C66/45B29C66/1122B29C65/02B29C65/8253B29C66/742B29C66/746B29C65/522B29C66/83413B29C65/7894B29C66/0222B29C66/929H01L21/67017B32B15/08B32B27/06B32B37/16B32B38/18B32B7/12G09F9/00G09F9/30H01L21/02H01L21/304B29C63/024B29C65/4805B29C71/0009B29C2071/0045B29C2791/004
Inventor 奥山哲雄德田桂也应矢量之渡边直树
Owner TOYOBO CO LTD
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