Laminate manufacturing apparatus and laminate manufacturing method
A manufacturing method and laminated body technology, which is applied in lamination devices, semiconductor/solid-state device manufacturing, identification devices, etc., can solve problems such as damage, brittleness, and difficulty in peeling, and achieve the effect of uniform control
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no. 1 Embodiment approach
[0078] The laminate manufacturing apparatus according to the first embodiment has the following configuration.
[0079] (1) A laminate manufacturing device comprising:
[0080] An inorganic substrate transfer device for transferring inorganic substrates;
[0081] And a water supply device for supplying an aqueous medium to the surface of the inorganic substrate coated with the silane coupling agent, and / or the surface of the heat-resistant polymer film coated with the silane coupling agent;
[0082] And a laminating device for laminating the first sheet and the second sheet after supplying the aqueous medium.
[0083] (2) The laminated body manufacturing apparatus as described in (1) which has the coating apparatus which apply|coats a silane coupling agent to an inorganic board|substrate.
[0084] (3) The laminate manufacturing apparatus according to (1) or (2), comprising an inorganic substrate cleaning device for cleaning the inorganic substrate before supplying the aqueou...
no. 2 Embodiment approach
[0218] The laminate roll manufacturing apparatus according to the second embodiment has the following configuration.
[0219] (1) A laminated body roll manufacturing apparatus having:
[0220] Metal foil handling devices for handling metal foil;
[0221] And a water supply device for supplying an aqueous medium to the surface of the metal foil coated with the silane coupling agent, and / or the surface of the heat-resistant polymer film coated with the silane coupling agent;
[0222] And a roll lamination device that bonds metal foil and heat-resistant polymer film after one or both of them are supplied with an aqueous medium.
[0223] (2) The laminated body roll manufacturing apparatus as described in (1) which has the coating apparatus which apply|coats a silane coupling agent to metal foil.
[0224] (3) The laminated body roll manufacturing apparatus as described in (1) or (2), which has the metal foil washing|cleaning apparatus which washes the metal foil before supplying ...
no. 3 Embodiment approach
[0293] The heat-resistant polymer film laminate manufacturing apparatus according to the third embodiment has the following configuration.
[0294] (1) An apparatus for manufacturing a heat-resistant polymer film laminate, comprising:
[0295] A film transfer device for transferring the first heat-resistant polymer film;
[0296] And a water supply device for supplying an aqueous medium to the surface of the first heat-resistant polymer film coated with the silane coupling agent, and / or the surface of the second heat-resistant polymer film coated with the silane coupling agent;
[0297] After supplying an aqueous medium to one or both of the first heat-resistant polymer film and the second heat-resistant polymer film, the first heat-resistant polymer film and the second heat-resistant polymer film are laminated. laminating device.
[0298] (2) The apparatus for producing a heat-resistant polymer film laminate according to (1), comprising a coating device for applying a silan...
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