Environmental control device and semiconductor device

A technology for controlling device and environment, applied in the direction of using electric means for temperature control, auxiliary controller with auxiliary heating device, etc., can solve the problems of increased noise and large temperature fluctuation, improve airflow distribution, ensure air supply volume and wind pressure, and the effect of avoiding vibration and noise

Pending Publication Date: 2022-05-13
SHANGHAI PRECISION MEASUREMENT SEMICON TECH INC
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Problems solved by technology

[0005] The purpose of the present invention is to disclose an environmental control device and semiconductor equipment, which are used to improve temperature stability and reduce vibration in precision instruments such as semiconductor equipment, especially to solve the large temperature fluctuations and obvious noise caused by air volume variable transmission If it becomes larger, there are technical problems such as resonance and obvious vibration

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  • Environmental control device and semiconductor device
  • Environmental control device and semiconductor device
  • Environmental control device and semiconductor device

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Embodiment Construction

[0034] The present invention will be described in detail below in conjunction with the implementations shown in the drawings, but it should be noted that these implementations are not limitations of the present invention, and those of ordinary skill in the art based on the functions, methods, or structural changes made by these implementations Equivalent transformations or substitutions all fall within the protection scope of the present invention.

[0035] It is to be understood that the terms "central", "vertical", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear" , "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", "Axial", "diameter The orientation or positional relationship indicated by "direction", "circumferential direction", "positive direction" and "negative direction" are based on the orientation or positional relationship shown in the drawings, and are only for ...

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Abstract

The invention provides an environment control device and semiconductor equipment, the environment control device is used for providing a required environment for a precision measurement system, the precision measurement system is arranged in a shell, and the precision measurement system comprises an air supply assembly, an air bath tail end and an air pipe connecting the air supply assembly and the air bath tail end, the air bath tail end comprises a plurality of damping connecting rod assemblies fixed to the shell and a static pressure cavity used for improving air flow distribution, and air flowing out of the static pressure cavity is introduced into the shell. According to the precise measurement system, the damping connecting rod assemblies fixed to the shell and the static pressure cavity used for improving airflow distribution are arranged in the shell which encloses the precise measurement system, so that the air supply airflow organization is improved, and the undesirable phenomenon that vibration and noise are generated to air flow in the shell when air is conveyed into the shell is eliminated.

Description

technical field [0001] The invention relates to the technical field of semiconductor equipment, in particular to an environment control device and semiconductor equipment. Background technique [0002] Semiconductor equipment, especially semiconductor measurement equipment, contains sensitive systems that require a controlled environment to ensure stability and repeatability. A well-constructed and stable closed system has a decisive influence on the accuracy of the final test results of semiconductor measurement equipment. Sensitive systems have extremely high requirements on temperature stability and vibration stability, so improving temperature stability and reducing vibration is particularly important for sensitive systems to output stable and accurate detection data. [0003] The US Patent of Invention with the publication number US5960638A discloses a modular clean room environment control unit. Each modular clean room environmental control unit has the ability to co...

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Application Information

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IPC IPC(8): G05D23/30
CPCG05D23/30
Inventor杜留洋陈梦来
OwnerSHANGHAI PRECISION MEASUREMENT SEMICON TECH INC