Method for removing carbon film on surface of metal workpiece
A technology for metal workpiece and carbon film, applied in the field of removing carbon film on the surface of metal workpiece, can solve the problems of environmental pollution, incomplete mold removal, etc., and achieve the effect suitable for large-scale use
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Embodiment 1
[0028] Embodiment 1 Removal of carbon film on the surface of metal workpiece
[0029] S1. Clean the metal workpiece to be removed from the carbon film, dry it, and put it on the workpiece carrier of the vacuum chamber, which is insulated from the vacuum chamber and connected to the cathode;
[0030] S2. After the metal workpiece is loaded into the vacuum chamber, the vacuum chamber is evacuated. When the vacuum degree reaches 5×10 -3 Ar and N are passed through when Pa 2 , the vacuum degree is controlled at 1Pa;
[0031] S3. Connect the metal workpiece to a high-frequency electric field, the electric field voltage is controlled at 800V, the duty cycle (power-on time and total pulse width ratio) is controlled at 10%, the frequency is controlled at 100KHz to excite the plasma, and the metal workpiece is immersed in the plasma Remove the film, and the film removal time is 180min;
[0032] S4. After the removal is completed, open the vacuum chamber and take out the metal workpi...
Embodiment 2
[0033] Embodiment 2 The removal of carbon film on the surface of metal workpiece
[0034] S1. Clean the metal workpiece to be removed from the carbon film, dry it, and put it on the workpiece carrier of the vacuum chamber, which is insulated from the vacuum chamber and connected to the cathode;
[0035] S2. After the metal workpiece is loaded into the vacuum chamber, the vacuum chamber is evacuated. When the vacuum degree reaches 5×10 -3 Ar and N are passed through when Pa 2 , the vacuum degree is controlled at 2Pa;
[0036] S3. Connect the metal workpiece to the power supply, control the voltage at 600V, and turn on the anode layer ion source to excite the plasma, so that the metal workpiece is immersed in the plasma to remove the film, and the film removal time is 120min;
[0037] S4. After the removal is completed, open the vacuum chamber and take out the metal workpiece.
Embodiment 3
[0038] Embodiment 3 Removal of carbon film on the surface of metal workpiece
[0039] S1. Clean the metal parts to be removed from the carbon film, dry them, and put them on the workpiece carrier of the vacuum chamber. The workpiece carrier is insulated from the vacuum chamber and connected to the cathode;
[0040] S2. After the metal workpiece is loaded into the vacuum chamber, the vacuum chamber is evacuated. When the vacuum degree reaches 5×10 -3 Ar and N2 are introduced at Pa, and the vacuum degree is controlled at 1Pa;
[0041] S3. Connect the metal workpiece to the high-frequency electric field, the voltage of the power supply is controlled at 400V, the duty cycle is controlled at 5%, and the frequency is controlled at 10MHz to excite the plasma, and the metal workpiece is immersed in the plasma to remove the film, and the film removal time is 240min;
[0042] After S4 film stripping, open the vacuum chamber and take out the metal workpiece.
[0043] The difference fro...
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