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Feedforward control method and system for nanometer operation robot, medium and electronic equipment

A nanometer operation and feedforward control technology, applied in the direction of program control manipulators, instruments, manipulators, etc., can solve problems such as difficult to solve, poor applicability, etc., to achieve good real-time, stable and reliable manufacturing and assembly, and high precision.

Inactive Publication Date: 2022-06-24
SUZHOU UNIV
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Problems solved by technology

This method depends too much on the input data. In the case of irregular shape of the data set, it is difficult to solve a function to approximate the data set, and the applicability is poor.

Method used

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  • Feedforward control method and system for nanometer operation robot, medium and electronic equipment
  • Feedforward control method and system for nanometer operation robot, medium and electronic equipment
  • Feedforward control method and system for nanometer operation robot, medium and electronic equipment

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Embodiment Construction

[0058] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention.

[0059] At present, the mainstream method of fabricating nanodevices is a "top-down" method, that is, removing some specific materials from the substrate to form the desired structure. Nanomanipulation is a "bottom-up" nanodevice fabrication technology, which can fabricate nanodevices by building three-dimensional nanostructures with basic materials. For example, carbon nanotubes (CNTs) can be used to build field effect transistors (FETs) to obtain carbon nanofield effect transistors (CNT-FETs). Due to the excellent electrical properties of carbon nanotubes, CNT-FETs far outperform silicon-based FETs and can be used for Fabrication of high-performance carbon-based chips. Aided by SEM v...

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Abstract

The invention discloses a feedforward control method for a nanometer operation robot. The feedforward control method comprises the steps that the nanometer operation robot is controlled to move in the X-axis direction and the Y-axis direction respectively; acquiring a tip image of the carbon nano tube on the nano operation robot through a scanning electron microscope, and taking the obtained motion trail of the tip of the carbon nano tube as the motion trail of the nano operation robot; obtaining offset according to the motion trail, and constructing a linear error model according to the relationship between the offset and the elongation of the piezoelectric ceramic driver; when the nano operation robot moves along the target track, acquiring a tip image of a carbon nano tube on the nano operation robot in real time through a scanning electron microscope to obtain the current displacement of the nano operation robot, obtaining the elongation of the current piezoelectric ceramic driver according to the current displacement, and calculating the current offset according to a linear error model; and adjusting the voltage of the piezoelectric ceramic driver to compensate the current offset. According to the invention, real-time and high-precision feedforward control of the nanometer operation robot can be realized.

Description

technical field [0001] The present invention relates to the technical field of drive control, in particular to a feedforward control method, medium, electronic device and system of a nano-manipulation robot. Background technique [0002] The feedforward control system of the nanomanipulation robot is mainly used to realize the precise control of the nanomanipulation robot. It has the advantages of cross-scale, high precision and high stability. The control of the movement direction and movement direction of the operation robot is generally generated by the drive board or signal generator, and the drive signal is amplified by the amplifier to drive the nano-wipe operation robot. Due to the inherent hysteresis and nonlinearity of piezoelectric ceramics, and The error caused by the dual-axis coupling reduces the positioning accuracy and trajectory accuracy of the nano-manipulation robot. This patent uses the PI inverse model to control the precise motion stage, and uses microsc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B25J9/16G06T1/00G06T7/73G06T5/00G06T7/136G06T7/187
CPCB25J9/16B25J9/1664G06T1/0014G06T7/74G06T7/136G06T7/187G06T5/70
Inventor 张略杨湛杨利涛何子良陈涛孙立宁
Owner SUZHOU UNIV
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