Microscope sample stage

Abstract

The invention discloses a microscope sample stage, which comprises a base; the three-dimensional movement mechanism is arranged on the base and can move in the first direction, the second direction and the third direction; the supporting structure is arranged on the three-dimensional movement mechanism and can rotate around a shaft parallel to the third direction; the sample holder placing part is arranged on the supporting structure; the supporting structure comprises a locking mechanism, and the sample holder is fixed through the locking mechanism. The sample table is small in occupied space and large in sample capacity, the position of a sample can be adjusted in a three-dimensional mode, the sample support can be automatically locked and unlocked, and the temperature of the sample can be controlled.

Description

technical field [0001] The invention relates to the technical field of microscopes, in particular to a microscope sample stage. Background technique [0002] Electron microscopy is a technique for microscopic imaging and in-situ analysis using an electron optical system. The characteristics of electron microscope are: under extremely high magnification, it can directly observe the morphological structure and sample composition of the sample; it has high resolution, can directly distinguish atoms, and conduct nanoscale crystal structure and composition analysis; development direction Tends to be multifunctional and comprehensive. [0003] The electron microscope sample stage is a device used to carry the sample to be tested in the electron microscope system. Most of the electron microscope sample stages in the prior art realize the observation of multiple samples at one time by using a large XY axis movement stroke, resulting in a large volume of the electron microscope, es...

AI Technical Summary

Problems solved by technology

Most of the electron microscope sample stages in the prior art use a large XY axis movement stroke to observe multiple samples at one time, resulting in a large volume of the electron microscope, especially the large volume of the sample chamber

At the same time, the number of samples carried by the sample stage of the prior art is still limited. When the number of observation samples is large, it is necessary to manually replace the samples frequently, and after each replacement of the samples, the equipment should be vacuumed again, and the observation position and focal length of the samples should be re-adjusted. In addition, in the process of changing samples in the existing technology, it is still necessary to manually lock and confirm whether the sample is installed firmly, so as to prevent the sample holder from falling off during the observation process, and lacks a device that can automatically lock, unlock and clamp the sample holder, which affects the observation effect , inefficiency, waste of time and manpower

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