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Method for processing crystal growth detection image in single crystal furnace, storage medium and upper computer

A processing method and technology of a single crystal furnace, which are applied in the directions of single crystal growth, crystal growth, chemical instruments and methods, etc., can solve the problems of inconvenient operation, slow reading and writing speed, and high installation environment requirements, so as to save costs and facilitate management. , The effect of flexible production operation process

Pending Publication Date: 2022-07-01
徐州晶睿半导体装备科技有限公司
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AI Technical Summary

Problems solved by technology

[0004] In the above-mentioned technology, for the real-time display of the crystal growth screen, a host computer and a display screen independent of the control operating system (i.e., the host computer) are used to install the camera algorithm software and display the camera screen respectively, which is costly and inconvenient to operate. Need to plan an independent space for placement, and have higher requirements for the on-site installation environment
At the same time, data interaction needs to establish a communication connection between the camera host and the PLC and a communication connection between the PLC and the host computer. There are many communication channels, and the requirements for data transmission stability are also increased, and the failure points of communication will also increase accordingly.
Moreover, the image obtained by the CCD camera is stored in the local hard disk of the computer, the reading and writing speed is slow, and there is a large delay and freeze in the display of the monitoring screen, and if the reading and writing frequency is increased, the service life of the hard disk is easily reduced; If the hard drive is turned off while the image is being written, the image will also be lost
Furthermore, the camera display and diameter and / or liquid mouth distance detection algorithm are independent of the upper computer operation control system software, and the communication interface of both parties needs to be developed separately. When the program of one party is modified, the other party generally needs to be modified appropriately, which is inconvenient to operate.

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  • Method for processing crystal growth detection image in single crystal furnace, storage medium and upper computer
  • Method for processing crystal growth detection image in single crystal furnace, storage medium and upper computer
  • Method for processing crystal growth detection image in single crystal furnace, storage medium and upper computer

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Embodiment Construction

[0030] The following describes in detail the embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary, and are intended to explain the present invention and should not be construed as limiting the present invention.

[0031] Reference is attached below Figure 1-7 Describe the processing method, storage medium, and upper computer of the crystal growth detection image in the single crystal furnace according to the embodiment of the present invention.

[0032] In the embodiment of the present invention, the above-mentioned method for processing crystal growth detection images in a single crystal furnace is used for a host computer, such as a dotNet host computer, and the above-mentioned host computer is...

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Abstract

The invention discloses a processing method of a crystal growth detection image in a single crystal furnace, a storage medium and an upper computer. The processing method of the crystal growth detection image in the single crystal furnace comprises the following steps: calling a diameter and / or liquid opening distance detection algorithm by machine vision software; the machine vision software obtains a crystal growth monitoring image in the single crystal furnace from a monitoring camera of the single crystal furnace; the machine vision software processes the crystal growth monitoring image by using a diameter and / or liquid opening distance detection algorithm to obtain a target image; and the monitoring software obtains the target image and displays the target image. According to the method for processing the crystal growth detection image in the single crystal furnace, the upper computer of the single crystal furnace can share one host and one display screen, so that the cost is saved, the management is convenient, and the whole production operation process is more flexible; meanwhile, communication interfaces do not need to be independently configured, and image real-time monitoring and diameter algorithm detection software can be packaged, migrated and installed in a unified mode.

Description

technical field [0001] The invention relates to the technical field of monitoring, in particular to a processing method, a storage medium and a host computer for detecting images of crystal growth in a single crystal furnace. Background technique [0002] In the process of using a single crystal furnace to produce single crystal silicon, the production process includes chemical material, temperature stabilization, necking, shoulder shrinking, equal diameter, and finishing. In this process, the thermal field temperature, pulling speed, etc. have a great influence on the diameter uniformity of the ingot, so the real-time detection and monitoring of the crystal production process screen is particularly important. [0003] In the related art, the algorithm program for calculating the diameter and the distance between the liquid openings is based on a frame of pictures of the actual growth process detected by a CCD (Charged Coupled Devices, a camera composed of charge-coupled dev...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H04N5/232C30B15/26
CPCC30B15/26H04N23/633H04N23/632H04N23/631
Inventor 王磊
Owner 徐州晶睿半导体装备科技有限公司
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