High-performance filter integrating passive device and acoustic mechanical wave device
A technology that integrates passive components and mechanical waves, applied in the field of filters, can solve the problems of large FABR components and low filter performance, and achieve the effects of saving space, low insertion loss, and strengthening the suppression of spurious harmonics
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[0028] Take the N41 filter as an example:
[0029] The corresponding N41 frequency band FBAR filter is prepared by MEMS processing technology, which is used to form a narrow-band filter with low insertion loss and high square coefficient. like figure 2 shown. The traditional FBAR device is combined with the substrate to design the suppression outside the passband, and the suppression depth outside the passband is realized by the increase of the FBAR cascade technology or the increase of the area ratio of the parallel / series resonator. This way will increase the area of the FBAR chip.
[0030] In the present invention, very few series of FBAR devices are used to realize the performance of low insertion loss and high out-of-band suppression. Some of the wiring and inductance wiring can be concentrated on the cap layer and RDL layer of the FBAR device, which can save the space of the substrate. The specific implementation can be to form the FBAR device on the original subs...
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