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Planetary dome mounting rack and vacuum coating machine

A mounting rack and planetary technology, applied in the field of planetary dome mounting racks and vacuum coating machines, can solve the problems of easy wear and tear of guide rails, large rolling runout of dome, complex structure, etc., to reduce wear, realize multi-angle rotation, and stabilize The effect of transmission

Pending Publication Date: 2022-07-15
捷捷微电(南通)科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The planetary dome (Dome) mounting frame commonly used in vacuum coating machines is a guide wheel structure, which has disadvantages such as a single non-adjustable evaporation angle, easy wear of the guide rail, and large rolling and beating range of the dome, which are also not conducive to the production of more stable products. Moreover, the structure is relatively complex, and it takes longer to maintain and replace spare parts

Method used

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  • Planetary dome mounting rack and vacuum coating machine
  • Planetary dome mounting rack and vacuum coating machine
  • Planetary dome mounting rack and vacuum coating machine

Examples

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Effect test

no. 1 example

[0040] Please refer to Figure 1 to Figure 3 , This embodiment provides a planetary dome mount 100 , the planetary dome mount 100 includes a planetary orbit 1 , a planetary carrier 2 , a transmission gear set 3 , a transmission rod 4 , a universal joint 5 and a dome socket assembly 6 .

[0041] The planetary track 1 is in the shape of a circular ring, the inner wall of the planetary track 1 is provided with internal teeth 11 , and the trajectory of the internal teeth 11 is also a circular ring. The planet carrier 2 is slidably installed inside the planet orbit 1 . The transmission gear set 3 is mounted on the planet carrier 2 and meshes with the internal teeth 11 . In this way, the planetary carrier 2 can rotate on the inner wall of the planetary track 1, which is equivalent to the planetary carrier 2 rotating in the planetary track 1, thereby driving the dome 200 on the planetary carrier 2 to rotate synchronously.

[0042] The transmission rod 4 is installed on the planetar...

no. 2 example

[0066] This embodiment provides a vacuum coating machine. The vacuum coating machine includes a dome 200 and the planetary dome mount 100 provided in the first embodiment. The dome 200 is mounted on the dome socket assembly 6 of the planetary dome mount 100. The vacuum coating machine A vacuum cavity may also be included, and both the dome 200 and the planetary dome mount 100 are installed in the vacuum cavity.

[0067] The beneficial effects of the vacuum coating machine provided by the embodiment of the present invention include:

[0068] 1. Internal teeth 11 are arranged on the inner wall of the annular planetary track 1, and the planet carrier 2 meshes with the internal teeth 11 through the transmission gear set 3, which can realize a more stable transmission, and greatly reduce the wear of the traditional planetary guide rails, and , the effect of 200 revolutions and rotations of the dome can be achieved;

[0069] 2. The dome socket assembly 6 is connected to the transmi...

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Abstract

The embodiment of the invention provides a planetary dome mounting rack and a vacuum coating machine, and relates to the technical field of semiconductors. The planetary dome mounting frame comprises a planetary track, a planetary support, a transmission gear set, a transmission rod, a universal joint and a dome socket assembly, the planetary track is in a circular ring shape, and inner teeth are arranged on the inner wall of the planetary track; the planetary support is slidably mounted in the planetary track; the transmission gear set is installed on the planet support and meshed with the inner teeth. The transmission rod is installed on the planetary support, and one end of the transmission rod is connected with the transmission gear set. The universal joint is mounted on the transmission rod; and the dome socket assembly is connected to the universal joint. The planetary dome mounting frame can achieve more stable transmission, abrasion is greatly reduced compared with a traditional planetary guide rail, the revolution and rotation effects of a dome can be achieved, and multi-angle rotation of the dome can be achieved.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a planetary dome mounting frame and a vacuum coating machine. Background technique [0002] The planetary dome mounting frame used in the common vacuum coating machine is a guide wheel structure, which has shortcomings such as single non-adjustable evaporation angle, easy wear and tear of the guide rail, and large rolling runout of the dome, and these shortcomings are not conducive to the production of more stable Moreover, the structure is more complicated, and maintenance and replacement of spare parts take longer. SUMMARY OF THE INVENTION [0003] The objects of the present invention include providing a planetary dome mounting frame and a vacuum coating machine, which can increase the transmission stability and realize the adjustment of multiple evaporation angles. [0004] Embodiments of the present invention can be implemented as follows: [0005] In a first aspec...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/50C23C14/24
CPCC23C14/505C23C14/24
Inventor 谈晶陆帅龙薛文明
Owner 捷捷微电(南通)科技有限公司