Wafer storage library and transfer system

Abstract

The invention provides a wafer storage library and a transfer system. The storage library comprises two sets of lifting mechanisms; the rails are arranged between the two sets of lifting mechanisms, the rails are sequentially arranged from top to bottom, the two ends of each rail are connected with the two sets of lifting mechanisms respectively, and storing and taking mechanisms are arranged on the rails; the storage racks are arranged on the two sides of the rails, the two storage racks are each provided with a plurality of layers of storage stations, the storage stations are used for storing wafers, and the rails correspond to the storage stations in a one-to-one mode. The lifting mechanisms are arranged on the two sides of the storage frame to transfer the wafers, the transfer efficiency of the wafers is guaranteed, the rails corresponding to the multiple layers of storage stations one to one are arranged, and the storage and taking mechanisms used for storing and taking the wafers are arranged on the rails, so that the storage and taking efficiency of the wafers is guaranteed.

Description

technical field [0001] The present specification relates to the technical field of semiconductor wafer access, in particular to a wafer storage library and a transfer system. Background technique [0002] In the semiconductor industry, wafers are an important part of them. Wafers refer to silicon wafers used to make silicon semiconductor circuits. High-purity polysilicon is dissolved and mixed with silicon crystal seeds, and then slowly pulled out to form a cylindrical shape. of monocrystalline silicon. The silicon ingot is ground, polished and sliced ​​to form a silicon wafer, that is, a wafer. [0003] In the semiconductor manufacturing process, it is often necessary to access the wafers in the storage library. Since the storage library is generally multi-layer storage, in the process of accessing the wafers, it is often necessary to access the wafers of different layers. The access work is carried out in a circle, and the transfer of the wafers is carried out by the tra...

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Problems solved by technology

[0003] In the semiconductor manufacturing process, it is often necessary to access the wafers in the storage library. Since the storage library is generally multi-layer storage, in the process of wafer access, it is often necessary to access the wafers of different layers. The storage and retrieval of wafers is carried out, and the transfer of wafers is carried out through traditional stackers, resulting in low wafer access and transfer efficiency

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