Semiconductor temperature control equipment with precooling function and temperature control method
A technology of temperature control equipment and semiconductors, applied in temperature control, control/regulation system, non-electric variable control and other directions, can solve the problems of low temperature control accuracy and low heat exchange efficiency, and achieve the goal of improving temperature control accuracy, reducing requirements, The effect of improving space utilization
Pending Publication Date: 2022-07-22
BEIJING JINGYI AUTOMATION EQUIP CO LTD
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Problems solved by technology
[0003] The invention provides a semiconductor temperature control device and a temperature control method with a pre-cooling function, which are used to solve the problems of low heat exchange efficiency and low temperature control accuracy in existing temperature control devices
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[0026] The embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples. The following examples are intended to illustrate the present invention, but not to limit the scope of the present invention.
[0027] In the description of the embodiments of the present invention, it should be noted that the terms "center", "portrait", "horizontal", "top", "bottom", "front", "rear", "left", "right" , "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, only for the convenience of describing this Inventive embodiments and simplified descriptions are not intended to indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operate in a particular orientation, and therefore should not be construed as limitin...
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The invention provides semiconductor temperature control equipment with a pre-cooling function and a temperature control method, and relates to the technical field of semiconductors, the semiconductor temperature control equipment comprises a circulation system and a refrigeration system, the circulation system comprises a water pump and a water tank, a liquid outlet of the water pump is communicated with a liquid inlet of load equipment, and a first temperature sensor is arranged at a liquid outlet of the load equipment; and a liquid outlet of the load equipment is communicated with a liquid inlet of the water tank. Firstly, through cooperation of the heat exchange device and the water tank, pre-heat exchange of a refrigerant on circulating liquid is achieved, then secondary heat exchange of the refrigerant on the circulating liquid is achieved through the first evaporator, through pre-heat exchange of the circulating liquid, the temperature of the circulating liquid entering an inlet of the first evaporator is reduced, and the requirement for the first evaporator is lowered; and the temperature control precision of the temperature control equipment is improved. The heat exchange device and the pipeline are arranged in the water tank, and the appearance and the size of the temperature control equipment and the appearance and the size of parts are not changed, so that the space utilization rate of the temperature control equipment is improved.
Description
technical field [0001] The invention relates to the technical field of semiconductors, and in particular, to a semiconductor temperature control device and a temperature control method with a pre-cooling function. Background technique [0002] At present, most of the cascade refrigeration systems for temperature control equipment for wafer processing are that the circulating liquid and the refrigerant only conduct one heat exchange through the evaporator. Since the temperature of the circulating liquid entering the inlet of the evaporator is relatively high, the circulation liquid is only used in the evaporator. Heat exchange is highly dependent on the evaporator, which is likely to cause excessive fluctuation of the inlet temperature of the evaporator, which makes it easy to cause excessive fluctuation in the output of the compressor, and the opening of the electronic expansion valve fluctuates back and forth, resulting in low temperature control accuracy. SUMMARY OF THE I...
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IPC IPC(8): G05D23/20
CPCG05D23/20
Inventor 张志军何文明
Owner BEIJING JINGYI AUTOMATION EQUIP CO LTD