Device and method for high-precision adjustment and separation of parallelism of laser beams

Abstract

The invention discloses a device for high-precision adjustment and separation of parallelism of laser beams. The device comprises a Raman light beam splitting module, an auxiliary adjustment unit, a laser light source, a position sensitive quadrant photodiode, a three-coordinate measuring instrument, a precision displacement table and the like. The invention further discloses a method for adjusting the parallelism of the separated laser beams at high precision, high-precision parallelism of three beams of Raman light and high coincidence of reverse light beams in the atomic interference gyroscope are realized by utilizing mutual cooperation of a three-coordinate instrument and a position sensitive quadrant photodiode, the method does not depend on the atomic interference process, and the total error is smaller than 57.6 microrad. In addition, the optical element and the quartz substrate are bonded and fixed by utilizing a hydroxyl catalytic bonding technology, so that a new way is provided for stably keeping high-precision parallelism of three beams of Raman light, and engineering application of the atom interference gyroscope is promoted.

Description

technical field [0001] The invention relates to the technical field of optical precision calibration, in particular to a device for adjusting the parallelism of a split laser beam with high precision, and a method for adjusting the parallelism of a split laser beam with high precision. technical background [0002] As a new type of inertial measurement instrument, the atomic interferometric gyroscope has the potential of high measurement accuracy, and provides a new technical means for the precise measurement of rotation, and is gradually applied in the fields of basic science and engineering technology. In order to improve the index of the atomic interference gyroscope, it is a more effective way to increase the area of ​​the interference loop. However, the construction of a large-area interference loop requires precise control of the wave vector direction of the Raman light to meet the closing requirements of the interference loop, so the parallelism between the separated ...

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Problems solved by technology

[0004] To adjust the parallelism of the separated laser beams and the coincidence of the incident light and the reflected light, the general method is to use the diaphragm to complete, a pair of reference diaphragms are placed in parallel with the other pair of diaphragms, and the centers of the two pairs of diaphragms are kept parallel. The two beams of light pass through the centers of the two pairs of apertures at the same time, and a pair of parallel beams can be obtained. The position of the spot is adjusted by using a polarization beam splitter, a reticle, etc., and the overlap of the beams is realized. However, the adjustment accuracy of this method is relatively low. Low; Another method is to use an autocollimator to assist in the calibration of beam parallelism and coincidence. It is difficult to adjust the laser parallelism with a large separation distance, and

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