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Non-contact height measurement scribing machine

A dicing machine, non-contact technology, applied in the direction of grinding frame, measuring device, grinding machine tool parts, etc., can solve the problems of poor stability of height measurement, signal transmission affected by optical fiber cables, etc., and achieve the goal of improving stability Effect

Active Publication Date: 2022-08-05
苏州和研精密科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a non-contact height measuring scribing machine to solve the problems that the existing scribing machine optical fiber cable is too long to affect signal transmission and the height measurement stability is poor

Method used

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  • Non-contact height measurement scribing machine
  • Non-contact height measurement scribing machine
  • Non-contact height measurement scribing machine

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Embodiment Construction

[0026] The following examples will be based on the embodiments to clearly and complete the technical scheme of the present invention. Obviously, the embodiment described is part of the embodiments of the invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technical personnel in the art under the premise of not creating creative labor belong to the protection of the present invention.

[0027] Technical personnel in this technical field can understand that unless otherwise defined, all the terms (including technical terms and scientific terms) used here have the same significance as ordinary technical personnel in the field of the invention. It should also be understood that the terms defined in the universal dictionary should be understood as the meaning of consistent with the context of the existing technology, and unless it is specifically defined as here, it will not be idealized or too too much. Formal m...

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Abstract

The invention relates to the technical field of semiconductor cutting, and provides a non-contact height measurement scribing machine which comprises a mounting base, a cutting workbench, an optical fiber sensor, an optical fiber amplifier and an optical fiber fixing assembly. The cutting worktable is supported and fixed on the surface of the mounting seat and is used for bearing a workpiece; the optical fiber sensor is installed on the cutting workbench and used for receiving optical signals emitted from the light source to the spindle blade. The optical fiber amplifier is installed on the side edge of the installation base. The optical fiber fixing assembly comprises a first fixing part and a second fixing part, the first fixing part is arranged on the cutting workbench, and the second fixing part is arranged on the mounting base, so that an optical fiber cable section after an optical fiber sensor is led out is fixed, and an optical fiber cable section connected with an optical fiber amplifier is fixed. In this way, the optical fiber cable with the large length is fixed along the way, signal transmission of the optical fiber sensor is prevented from being affected by repeated movement of the optical fiber cable, and therefore the stability of blade height measurement is improved.

Description

Technical field [0001] The invention involves semiconductor cutting technology, especially a non -contact high -padding machine. Background technique [0002] The chip machine is a key equipment for the semiconductor industry, which is mainly used for the processing of wafers. The chip machine is cut by the Z -axis bearer the air spindle to drive the sand wheel blade. As the processing is proceeded, the blade is constantly worn. If the position of the Z axis remains unchanged, the corresponding cutting depth will gradually become lighter. Therefore, right, right, right, right? The blade is measured to maintain the relative position of the blade and the material during processing, which is essential. [0003] The existing chip machine mainly measures the position of the blade in a non -contact high method to ensure the preset cutting depth. Among them, the core component of non -contact measurement is optical fiber sensor and optical fiber amplifier. The light sensor needs to be c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B28D5/02B28D7/00B24B49/12B24B41/02H01L21/304G01B11/02
CPCB28D5/0011B28D5/0029B28D5/022B28D5/0058B28D5/0082B24B49/12B24B41/02H01L21/3043G01B11/02
Inventor 袁慧珠张明明
Owner 苏州和研精密科技有限公司
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