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Wafer cleaning device for liquid protection

A technology for cleaning devices and wafers, applied in the direction of using liquid cleaning methods, cleaning methods and utensils, chemical instruments and methods, etc., can solve problems such as damage to drive and transmission structures, achieve smooth rotation, and improve waterproof effects

Pending Publication Date: 2022-08-09
宁波润华全芯微电子设备有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Therefore, the present invention provides a wafer cleaning device for liquid protection, which effectively solves the problem that when the wafer is cleaned, the liquid enters the bottom of the mounting plate from the peripheral side of the wafer table, causing damage to the structure of the drive and transmission

Method used

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  • Wafer cleaning device for liquid protection
  • Wafer cleaning device for liquid protection
  • Wafer cleaning device for liquid protection

Examples

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no. 1 example

[0039] see Figure 1-3The first embodiment of the present invention provides a wafer cleaning device 100 for liquid protection, including: a mounting plate 110, the mounting plate 110 includes a mounting plate body, a mounting hole 111 opened in the center of the mounting plate body, and a mounting plate The baffle plate 112 on the top surface of the disc body and surrounding the installation hole 111; the wafer support portion 120, the wafer support portion 120 includes a wafer support table 121, a support column 122 and a liquid blocking cover 130, the support column 122 is arranged in the installation hole 111, and the wafer support table 121 is connected to the top of the support column 122 , the liquid blocking cover 130 surrounds the supporting column 122 , and the liquid blocking cover 130 covers the mounting hole 111 .

[0040] In this embodiment, the mounting plate 110 is used for accommodating the nozzles and other devices required for cleaning, and at the same time,...

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PUM

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Abstract

The invention discloses a wafer cleaning device for liquid protection, and the device is characterized in that the device comprises a mounting disc which comprises a mounting disc body, a mounting hole formed in the center of the mounting disc body, and a baffle plate which is disposed on the top surface of the mounting disc body and surrounds the mounting hole; the wafer bearing part comprises a wafer bearing table, a supporting column and a liquid blocking cover, the supporting column is arranged in the mounting hole, the wafer bearing table is connected with the top of the supporting column, the liquid blocking cover surrounds the supporting column, and the mounting hole is covered with the liquid blocking cover. The wafer cleaning device solves the problem that when wafers are cleaned, liquid enters the bottom of the mounting disc from the peripheral side of the wafer bearing table, and consequently driving and transmission structures are damaged.

Description

technical field [0001] The invention relates to the field of wafers in the semiconductor industry, in particular to a wafer cleaning device for liquid protection. Background technique [0002] At present, in the wafer processing process, it is necessary to remove contaminants such as organics, particles, metal impurities, natural oxide layers, quartz, and plastics remaining on the wafer surface without destroying the surface characteristics of the wafer. Therefore, multiple cleanings of the wafer are required. [0003] In the cleaning process of a single wafer, the wafer is generally placed on the wafer carrier, and the wafer is rinsed by spraying the cleaning solution through the nozzle on the peripheral side of the wafer carrier. At the same time, the wafer carrier rotates to make the wafer cleaning effect better it is good. However, the cleaning liquid will flow to the bottom of the wafer stage along with the side of the wafer stage, and contact the structure for drivin...

Claims

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Application Information

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IPC IPC(8): B08B3/02B08B3/14B08B13/00
CPCB08B3/022B08B3/14B08B13/00Y02P70/50
Inventor 刘长伟耿克涛姜岩松陈理
Owner 宁波润华全芯微电子设备有限公司
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