Determination method of semispherical hyperelastic microstructure of designable linear sensitivity sensor

Abstract

The invention discloses a method for determining a semispherical hyperelastic microstructure of a designable linear sensitivity sensor, and the method comprises the steps: enabling a semispherical microstructure surface on a sensing unit layer of the sensor to directly contact with a contact electrode, so that the semispherical microstructure made of a hyperelastic body is subjected to structural deformation after pressure is applied; the sensor resistance is linearly changed by changing the contact area between the contact electrode and the sensitive layer; according to the determination method, the contact surface area of a single microstructure after deformation and the generated height change are deduced by utilizing a superelastic body deformation continuity assumption, and then different step sizes, numbers and layouts of the microstructures are calculated according to normal stress distribution balance conditions and a preset deformation threshold value under the multi-step hemispherical microstructures. The design determination of adopting the hyperelastic material as the sensitive layer of the piezoresistive sensor is realized, and the application requirements of quantitatively designing the linear sensitivity are met; the method can meet the requirements of simple calculation and high accuracy, and the purpose that the sensor can design linear sensitivity is achieved.

Description

technical field [0001] The invention relates to the technical field of flexible piezoresistive sensors, in particular to the field of microstructure design of flexible piezoresistive sensors, in particular to a method for determining a hemispherical superelastic microstructure of a linear sensitivity sensor, which is particularly suitable for determining linearity, detection interval A method for determining the size, quantity and layout of microstructures using superelastic materials as the substrate of the sensitive unit layer with higher requirements. Background technique [0002] Due to its inherent flexibility and better attachability, flexible sensors can achieve the purpose of monitoring target functions with appropriate feedback signals, such as human health detection, gesture recognition and prediction, robotic space perception and human-computer interaction. and other fields are continuing to play its important application value. Among them, the piezoresistive pre...

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Problems solved by technology

At the same time, although the flexible sensors prepared by the above-mentioned bionic methods have better linearity, their microstructures are randomly obtained, and it is difficult to customize the functions in actual application scenarios.

To this end, step microstructures were made by introducing laser-processed silicon wafers [Zhong M, Zhang L et al. Chemical Engineering Journal, 2021: 412, 128649], and machining micro-dome structure templates [Ji B, Zhou Q et al. Small,2021:17(43),2103312], artificial dispensing microspherical structure [Fang F,Tao X et al.Micromachines,2020:11(2),161], etc., are all pre-designed to complete specific microstructure processing, Thus avoiding the introduction of random structure, but also showing a certain weak linearity

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