Four-axis nanometer control system

Abstract

The invention provides a four-axis nanometer control system, and belongs to the technical field of numerical control machine tool control. The four-axis nanometer control system comprises a four-axis motion control platform, and the four-axis motion control platform comprises a first X-axis control platform, a second Y-axis control platform, a third Z-axis control platform and a fourth theta-axis control platform. The first X-axis motion platform is used for controlling the acceleration and the traction speed of the first target object in the X-axis direction; the Y shaft is mounted on the X shaft and is used for adjusting the distance between different second target objects; the third Z-axis control platform is used for controlling the first target object to move in the Z-axis direction; the fourth theta-axis is installed on the Y-axis and used for assisting the first X-axis control platform and the second Y-axis control platform to change the movement direction. The first X-axis control platform and the fourth theta-axis control platform are powered by a first direct-current voltage source, and the second Y-axis control platform and the third Z-axis control platform are powered by a second alternating-current voltage source. According to the invention, nanoscale four-axis motion control of the nozzle and the spinning process can be realized.

Description

technical field [0001] The invention belongs to the technical field of numerical control machine tool control, in particular to a four-axis nanometer control system. Background technique [0002] In the field of robotics, multi-axis linkage motion controller is the most widely used automation control device. It has been used in industrial manufacturing, medical treatment and other fields, and the division of labor tends to be refined. For example, the multi-channel five-axis simultaneous CNC system for compound machine tools has been exhibited at the China International Machine Tool Fair (CIMT) for many years. [0003] In terms of nano-level control, Chinese invention patent publication CN107219821A proposes a six-axis linkage robot curve interpolation algorithm and nano-level motion control system. The invention has the advantages of high integration, simple operation and convenient management, and can achieve high processing speed and The high-speed machining of continuou...

AI Technical Summary

Problems solved by technology

[0004] However, the inventors found that when the prior art adopts the above-mentioned four-axis, five-axis or six-axis control structure, a unified AC power supply is used to perform a single static control on different axis control platforms

Taking the four-axis linkage control system as an example, the four axes (X-Y-Z-θ) are working almost at the same time, which brings a large amount of system interference; a single static AC control will also bring harmonics to the nano-scale precision motion process. wave interference

In addition, different axial controls (such as X-θ / Y-θ) are actually related, and the existing technology does not take into account that the voltage supply control is adjusted and fed back based on this relationship

[0005] Therefore, the multi-axis linkage motion controller of the prior art needs to be improved, especially when it is applied to the multi-axis control of nano-scale moving objects (such as nozzle and spinning process), its accuracy needs to be further improved

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