Process for determing possible configurations of machining plant
A technology of processing equipment and processing steps, applied in the field of controlling multiple processing equipment, can solve the problems of limitation, imperfect description, imperfect production control, etc.
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[0027] FIG. 1 shows a schematic diagram of a processing device, such as a so-called "cluster tool" used in semiconductor technology. The processing plant 10 has five processing modules A, B, C, D and E, so-called process boxes, in which, for example, CVD methods (chemical vapor deposition) for forming layers on semiconductor substrates can be carried out. Furthermore, the processing plant 10 has two loading and unloading stations 17 and 18 , via which semiconductor wafers can be fed in for processing in the processing plant 10 and output from the processing plant 10 after processing. The transport of the semiconductor wafers within the processing plant 10 takes place by means of a robot 19 mounted in the center of the processing plant 10 .
[0028] The table below shows possible structures of individual process instructions (EPA) for carrying out the method according to the invention.
[0029] EPA Number: 101
[0030] Processing equipment number: 10
[0031] Program to be c...
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