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Process for determing possible configurations of machining plant

A technology of processing equipment and processing steps, applied in the field of controlling multiple processing equipment, can solve the problems of limitation, imperfect description, imperfect production control, etc.

Inactive Publication Date: 2004-08-11
INFINEON TECH AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This problem is also made more difficult by the fact that not all existing equipment can be used
Due to maintenance or repair work, parts of processing equipment are often not available or their use is restricted, which must of course be taken into account in production control or production planning
[0009] Unfortunately, the hitherto used methods for production control pay little attention to the fact that often a part of the processing plant is unavailable or its use is limited due to maintenance or repair work, thus, given the maximum capacity of the processing plant and / or or the production cycle of different products often have imperfect production control or insufficient explanation

Method used

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  • Process for determing possible configurations of machining plant
  • Process for determing possible configurations of machining plant

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Embodiment Construction

[0027] FIG. 1 shows a schematic diagram of a processing device, such as a so-called "cluster tool" used in semiconductor technology. The processing plant 10 has five processing modules A, B, C, D and E, so-called process boxes, in which, for example, CVD methods (chemical vapor deposition) for forming layers on semiconductor substrates can be carried out. Furthermore, the processing plant 10 has two loading and unloading stations 17 and 18 , via which semiconductor wafers can be fed in for processing in the processing plant 10 and output from the processing plant 10 after processing. The transport of the semiconductor wafers within the processing plant 10 takes place by means of a robot 19 mounted in the center of the processing plant 10 .

[0028] The table below shows possible structures of individual process instructions (EPA) for carrying out the method according to the invention.

[0029] EPA Number: 101

[0030] Processing equipment number: 10

[0031] Program to be c...

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Abstract

A process is disclosed for determining the possible configurations of machining plants for controlling and / or planning the production of at least one product in a plurality of machining plants having each several machining modules. The process comprises the following steps: (a) a sequence of individual processing instructions is determined for each product and by means of these instructions a particular machining plant is selected and the processing steps to be carried out in the machining plants are defined; (b) possible configurations of the machining plant and the product machining time in the machining plant for each configuration are determined depending on the machining steps that need to be carried out; (c) information on the state of the machining modules in the machining plants is provided; (d) the configurations of the machining plant which are possible in the given state of the machining modules and the product machining time in the machining plant for each configuration are derived from the information on the state of the machining modules and the machining steps to be carried out.

Description

technical field [0001] The invention relates to a method for controlling a plurality of processing plants each having a plurality of processing modules for producing at least one product. Background technique [0002] Modern industrial production is often characterized by a high degree of automation. Especially in the semiconductor industry, a high degree of automation is absolutely necessary in order to be able to compete internationally. [0003] During the production process the product goes through a series of processing steps which are carried out automatically on the product to be processed by different processing equipment. For example, in the process of producing integrated semiconductors, products go through as many as 600 steps, a considerable part of which can be carried out in a clean indoor environment with highly specialized processing equipment. For this purpose, many identical processing plants are often grouped together in one processing area ("bay"). [...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B19/418H01L21/02H01L21/66
CPCG05B19/41865H01L22/20Y02P90/02G05B19/418
Inventor H·布克施米德S·坎尼P·菲德尔M·舍贝斯塔P·希尔特雷特K·布雷姆J·布兰德特
Owner INFINEON TECH AG
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