Process for mfg. multi-phase diffraction optic element
A diffractive optical element and phase technology, which is applied in optical elements, photoplate making process of patterned surface, optics, etc., can solve the problems that the device efficiency is difficult to exceed 90%, it is difficult to ensure the accuracy of overlay, and the accuracy of overlay is difficult to guarantee, etc.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0020] figure 2 It shows the specific process implementation process of making 8-phase diffractive microlens array by using the self-alignment process of the invention.
[0021] ①Sputter a 0.8μm thick chromium film on the substrate to be made into a microlens by a magnetron sputtering apparatus, then throw a positive photoresist, and after pre-baking, use the first mask to expose, such as figure 2 as shown in (a);
[0022] ②After developing and hardening the film, wet-etch the chromium film not masked by the glue, and use reactive ion beam etching (RIE) technology to etch the substrate with a depth of d / 8, where d is the total etching phase depth, such as figure 2 (b) shown. At this time, an initial distribution of 8-phase steps is formed, and the subsequent process does not require strict alignment of the dark and bright boundaries of the mask with the boundaries of these steps.
[0023] ③Continue to shake the positive photoresist and expose it with the second mask, suc...
PUM
Property | Measurement | Unit |
---|---|---|
wavelength | aaaaa | aaaaa |
depth | aaaaa | aaaaa |
refractive index | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com