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Silicon micro machine inclination sensor and its manufacturing method

An inclination sensor, silicon micro-machine technology, applied in instruments, measuring inclination, measuring devices, etc., can solve the problems of weak anti-lateral coupling interference, large sensor power consumption, slow response, etc., to reduce the risk of signal disconnection , the effect of improving sensitivity and improving yield

Inactive Publication Date: 2005-04-20
HEFEI INST OF INTELLIGENT MACHINERY CHINESE ACAD OF SCI
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  • Claims
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Problems solved by technology

Traditional inclination sensors are large in size and are not suitable for areas with certain restrictions on volume and weight. At present, a thermal convection silicon inclination sensor has been developed at home and abroad, but this sensor consumes a lot of power and is resistant to lateral coupling interference. Weak, slow response

Method used

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  • Silicon micro machine inclination sensor and its manufacturing method
  • Silicon micro machine inclination sensor and its manufacturing method
  • Silicon micro machine inclination sensor and its manufacturing method

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Embodiment Construction

[0032] The silicon micromechanical inclination sensor consists of two silicon mass blocks 1A and 1B of different sizes, two parallel silicon strain beams 5 connecting them, and a glass substrate 2 with a step underneath. The height of the glass step is Equal to the maximum deformation of the silicon strain beam. Both the silicon mass 1A and the silicon mass 1B have electrodes 3 on their surfaces.

[0033] Two piezoresistors 4A and 4B, which are perpendicular to each other, are arranged at both ends of the silicon strain beam 5. The signals of the piezoresistors 4A and 4B can be output from the silicon mass at either end and installed on The four piezoresistors 4A and 4B on the two silicon strain beams 5 are cross-symmetrical.

[0034] Either one of the silicon mass 1A and the silicon mass 1B above the sensor can be sealed with the upper step of the glass substrate 2 below, and the glass substrate 2 is made of borosilicate glass with a thermal expansion coefficient closer to t...

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Abstract

A micromechanical inclination sensor has different two silicon blocks, two parallel strain silicon beams respectivelly linked to said silicon blocks, and a glass substrate with a step. Two strain silicon beams have 4 symmetrically crossed voltage-sensitive resistors to form a differentiating output for higher sensitivity. One silicon block at one end of strain silicon beam is as a free end and anothee silicon block at another end of strain silicon beam is as fixed end linked to the step surface of glass subtrate. Its advantages are simple structure and high resistance to lateral impact and lateral coupled interference.

Description

technical field [0001] The invention relates to the field of sensors controlled by automatic robots, in particular to a silicon micromechanical inclination sensor for attitude monitoring and control. Background technique [0002] The inclination sensor is a sensor used for attitude monitoring and control. It is used in various military and civilian applications such as satellites, missiles, tanks, artillery, aircraft, automobiles, ships, geological oil exploration, building construction, land and underwater operations of robots, etc. The field has a very wide range of applications. Traditional inclination sensors are large in size and are not suitable for areas with certain restrictions on volume and weight. At present, a thermal convection silicon inclination sensor has been developed at home and abroad, but this sensor consumes a lot of power and is resistant to lateral coupling interference. Weak and slow to respond. Contents of the invention [0003] The purpose of t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C9/06
Inventor 孔德义梅涛张涛倪林孙斐陶永春
Owner HEFEI INST OF INTELLIGENT MACHINERY CHINESE ACAD OF SCI
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