Equipment for preparing multi-layer metal coated composite film and its production process
A multi-layer metal and composite film technology, applied in metal material coating process, coating, sputtering plating and other directions, can solve the problems of high cost, mutual penetration and pollution of composite film layers, time-consuming and labor-intensive, etc., to reduce production. Cost, time and energy savings, improved product quality
Inactive Publication Date: 2005-09-14
CAIHONG GRP ELECTRONICS CO LTD +1
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The second is to place a composite material in a vacuum evaporation chamber. When evaporating, the vapor pressure of each material is different. The high vapor pressure evaporates first, and the low vapor pressure evaporates later to produce a multilayer composite film. The above two methods There are different deficiencies respectively. Although the former is simple in process, it is time-consuming and labor-intensive in the manufacturing process, and the cost is high. The latter is that there is mutual penetration and pollution between the coating layers
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[0013] Accompanying drawing is the specific embodiment of the present invention
[0014] Below in conjunction with accompanying drawing, content of the present invention will be further described
[0015] refer to figure 1 As shown, it includes a power supply 1, a vacuum evaporation chamber 2, a metal material 3 is built in the vacuum evaporation chamber 2, and at least two or more evaporation sources 4, 5 are arranged in the vacuum evaporation chamber 2 at the same time. Different evaporation materials 3 are placed in the source to evaporate according to the evaporation sequence.
[0016] figure 2 Shown is the process flow chart of the present invention, that is, vacuuming→evaporation material preheating→the first evaporation material evaporates to form the first coating film→the second evaporation material evaporates to form the second coating film→the rest can be deduced by analogy→complete more layer metal composite film.
[0017] To sum up, in the manufacture of alum...
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The present invention relates to an equipment for making multi-layer metal coat composite film and its making process. The equipment includes power supply, vacuum evaporation chamber, in which the metal material is set, and simultaneously at least two or more than two evaporation sources are set, in every evaporation source the different evaporation material is set, and these evaporation materials can be evaporated according to the time sequence of evaporation. It provides concrete technological process and steps for forming multi-layer metal coat composite film.
Description
1. Technical field [0001] The invention relates to a device and a manufacturing process of a multilayer metal coating composite film, which is especially suitable for the manufacture of multilayer metal coating films of color picture tubes. 2. Background technology [0002] At present, in the gas-phase composite film technology, there are generally two methods used. One is to evaporate only one material in one evaporation chamber to form a thin film. To manufacture a multi-layer composite film, it is necessary to repeat the manufacturing process of a single-layer film. The second is to place a composite material in a vacuum evaporation chamber. When evaporating, the vapor pressure of each material is different. The high vapor pressure evaporates first, and the low vapor pressure evaporates later to produce a multilayer composite film. The above two methods There are different deficiencies respectively. Although the former is simple in process, it is time-consuming and labor-...
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IPC IPC(8): C23C14/24C23C14/26
Inventor 王勇韩秀铃王新王鹏
Owner CAIHONG GRP ELECTRONICS CO LTD