Superhigh pressure dynamic pressure sensor

A dynamic pressure and sensor technology, applied in the direction of measuring blasting force, etc., to achieve the effect of high measurement pressure, improved dynamic response, and good dynamic characteristics

Inactive Publication Date: 2006-08-30
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0005] The sensor uses a replaceable gasket, a sensitive pressure-bearing diaphragm, a silicon-isolated SOI silicon micro-solid piezoresistive chip, and a strained column structure combined with a membrane-column, which solves the problem of measuring the explosion pressure field in the gun bore and the detonation measurement of the explosive column. Transient EHV measurement problems such as

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Embodiment Construction

[0012] refer to figure 1 ~Fig. 3, the main ultra-high pressure dynamic pressure sensor of the present invention comprises shell 2, and the circumference of shell 2 has sensitive pressure-bearing diaphragm, and one end of shell 2 is equipped with strain cylinder 3 by screw thread, and in strain cylinder 3 has a platform, which is provided with SOI silicon micro-solid piezoresistive chip 4 and circuit board 5, SOI silicon micro-solid piezoresistive chip 4 is connected with circuit board 5 through gold wire, and the lead wire on the circuit board 5 passes through the circuit board 5 on the platform. A hole passes through the bottom of the strain cylinder 3 , and a replaceable gasket 1 is provided at the other end of the casing 2 , and the replaceable gasket 1 is connected with a sensitive pressure-bearing diaphragm on the circumference of the casing 2 .

[0013] Considering that the pressure on the sensor is very high, another pressure plate 6 is used to fix the sensor on the sid...

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Abstract

The invention discloses an ultrahigh pressure dynamic pressure sensor that includes casing, sensitive bearing membrane, and strain cylinder. A platform that is set SOI silicon micro solid state pressure resistance chip and circuit board is on the cylinder. The SOI silicon micro solid state pressure resistance chip is connected to the circuit board by gold wire. The guide line on the circuit board penetrates from the bottom of strain cylinder of the hole on the platform. The other end of the casing is set changeable shim that connects to the sensitive pressure bearing membrane. The sensor is simple structure, high testing pressure, good dynamic feature. It can meet the demand in the occasion of powder detonating testing and bore pressure field testing.

Description

technical field [0001] The invention belongs to the field of production and application of pressure sensors, and relates to an ultra-high pressure dynamic pressure sensor. Background technique [0002] The measurement of the explosion pressure wave is of great significance for calculating the explosion-proof device, evaluating the destroying ability of the weapon, and calculating the flight distance and speed of the projectile. The explosion process of explosives is a transient process of ultra-high pressure and high temperature, which requires the sensor to have good dynamic performance and high temperature resistance. For example, when a certain type of explosive explodes, the pressure generated is as high as 10GPa, the temperature is as high as 3000°C, and the duration is at the μs level. The dynamic response of the widely used manganese-copper piezoresistive strain gauge sensor has always been a problem, and this sensor is disposable, with a li...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L5/14
Inventor 赵玉龙蒋庄德高建忠赵立波
Owner XI AN JIAOTONG UNIV
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