Minitype chemical propeller with pressure sensor

Abstract

The utility model relates to a micro-chemical thruster with a pressure sensor, which belongs to the field of micro-propulsion technology and MEMS technology. In order to solve the problem that the existing MEMS chemical thruster cannot be controlled by feedback, the present invention discloses a micro chemical thruster with a pressure sensor, which is composed of an upper silicon wafer and a lower silicon wafer, and is a series of basic A periodic array of propulsion units; the upper part of each basic propulsion unit integrates the combustion chamber, ignition chamber and nozzle, and the bottom of the nozzle communicates with the bottom of the combustion chamber through the ignition chamber; the lower part of each basic propulsion unit integrates A pressure sensor and an igniter are provided, the bottom of which is a concave prism structure, the top is a pressure sensitive film, the pressure sensor is embedded in the pressure sensitive film, and the igniter is located on the top surface of the pressure sensitive film. The invention makes it possible to measure the real-time pressure in the combustion chamber, simultaneously saves the process steps of bonding the combustion chamber and the nozzle, and avoids the alignment error caused by the bonding.

Description

technical field [0001] The invention relates to a micro chemical thruster, which belongs to the field of micro propulsion technology (Micro Propulsion) and MEMS technology (Micro Electro-Mechanical System). Background technique [0002] The propulsion system is the key subsystem of most spacecraft, mainly used for orbit maneuvering, orbit keeping and special attitude control of the spacecraft. However, in the past two decades, the microsatellites (mass less than 20kg) developed internationally, especially the nano / picosatellites (mass less than 10kg), are hardly equipped with propulsion systems, so they have extremely limited maneuverability. This is mainly because the traditional propulsion system has a large volume and mass, which is not suitable for the use of microsatellites. With the miniaturization of satellites, and the development of multi-nano / pico-satellite networking and formation flight, the demand for micro-propellers with small size, light weight, high precisi...

AI Technical Summary

Problems solved by technology

[0014] The purpose of the present invention is to solve the problem that the existing MEMS chemical thrusters cannot be feedback controlled, and reduce the difficulty of processing technology

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