Laser crystallization system and method for controlling quasi-molecular laser annealing energy density
A laser energy density, excimer laser technology, used in laser welding equipment, manufacturing tools, semiconductor/solid-state device manufacturing, etc., can solve problems such as damage, inability to quickly adjust the excimer laser energy density, and poor polysilicon crystalline state.
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[0022] Please refer to figure 1 , figure 1 It is a schematic diagram of a laser crystallization system 10 with optical detection and laser energy density correction functions of the present invention. Such as figure 1 As shown, the laser crystallization system 10 includes an excimer laser annealing device 12 and an optical detection device composed of a light source generator 14 and an image receiver 16 . The excimer laser annealing device 10 can generate an excimer laser and irradiate a substrate 18 in a linear scanning manner, thereby recrystallizing a silicon thin film on the surface of the substrate 18 from an amorphous silicon structure to a polysilicon structure. The optical detection device is used to judge whether the silicon film on the surface of the substrate 18 irradiated by the excimer laser has formed a good polysilicon structure, wherein the light source generator 14 can generate a visible light (such as white light) to irradiate the substrate 18, and it is in...
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