Laser crystallization system and method for controlling quasi-molecular laser annealing energy density

Abstract

Laser crystallizing system includes a quasi molecule laser annealing device and an optical detection device. Energy density method for controlling annealing procedure of quasi molecule laser in real time includes a procedure of determining optimal energy density and an annealing procedure of quasi molecule laser. The former procedure decides optimal energy density, and the latter carries out an annealing procedure of quasi molecule laser by using optimal energy density decided.

Description

technical field [0001] The present invention relates to a laser crystallization system and an excimer laser annealing method, in particular to a laser crystallization system with the functions of optical detection and laser energy density correction and a real-time control of the energy density of the excimer laser annealing process method. Background technique [0002] Liquid crystal display has the characteristics of thin and light appearance, low power consumption, good resolution, no radiation and anti-electromagnetic interference, so it has been widely used in information appliances such as mobile phones, personal digital assistants (PDAs), notebook computers, and flat-panel displays. on the product. However, with the improvement of users' requirements for display visual experience and the continuous expansion of new technology application fields, liquid crystal displays with higher image quality, high resolution and low price have become the trend of future display te...

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Problems solved by technology

Among them, the scanning electron microscope is used to inspect the grain size (grain size), shape and distribution. However, because this method must cut the substrate, and requires corrosion chemical treatment to highlight the grain boundary (grain boundary) for sample analysis, Not only does it not meet the needs of the production line, but it is also a destructive test, so it is only suitable for sampling inspection

The deep ultraviolet microscope is used to observe the arrangement of protrusions on the surface of polysilicon. However, since this method needs to magnify the sample to more than 10,000 times, it can only be used to detect the quality of polysilicon crystallization in a few microns on the substrate. , it will take several days to inspect a substrate if it is inspected on the entire substrate, which is very time-consuming. In addition, the equipment is quite sophisticated and complicated, and the price is expensive

[0006] Even if the crystallization state of polysilicon on the surface of the substrate is detected to be poor by using the above detection method, it is impossible to quickly adjust the energy density of the excimer laser suitable for the current situation.

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