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Lithium titanium co-doped nickel oxide base ceramic film and preparation method thereof

A nickel oxide-based, ceramic thin film technology, applied to dielectric thin film materials, lithium-titanium co-doped nickel oxide-based ceramic thin films and their preparation fields, can solve the problem of unstable dielectric constant of ferroelectric materials, unfavorable environmental protection requirements, dielectric problems such as small constants, to achieve the effects of easy control of film composition, short preparation period and stable performance

Inactive Publication Date: 2006-12-20
UNIV OF SCI & TECH BEIJING
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the above materials all have obvious disadvantages: (1) the dielectric constants of the first two types of materials are small, both less than 1000; (2) the dielectric constants of ferroelectric materials are unstable and change significantly with temperature; ( 3) Ferroelectric materials with large dielectric constants generally contain lead (such as PZN, PFW, PFN, PNN, etc.), which are seriously polluted during preparation and use, which is not conducive to environmental protection requirements
However, there is no report on the application of nickel oxide-doped ceramic films in the field of dielectric materials.

Method used

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  • Lithium titanium co-doped nickel oxide base ceramic film and preparation method thereof
  • Lithium titanium co-doped nickel oxide base ceramic film and preparation method thereof
  • Lithium titanium co-doped nickel oxide base ceramic film and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0023] The weighed 0.05205g (0.0005mol) Li(C 2 h 3 o 2 ) 2 2H 2 O and 1.90454g (0.0075mol) (C 2 h 3 o 2 ) 2 Ni·4H 2 O dissolved in 40ml CH 3 OCH 2 CH 2 In OH solvent, heat the solution to 100°C and keep stirring for 10 hours of dehydration reaction. After cooling the solution to 70°C, add 0.58012g (0.002mol) Ti(O·(CH 2 ) 2 ·CH 3 ) 4 , the solution was reheated to 100°C with stirring and reflux for 10 hours, and then washed with CH 3 OCH 2 CH 2 Adjust the solution concentration with OH, and add 1 milliliter of glacial acetic acid as a stabilizer to obtain a Li-Ti-Ni-O precursor solution; use a homogenizer to prepare a thin film, and the substrate is a platinum electrode substrate [Pt / Ti / SiO 2 / Si]. Before homogenizing the film, the precursor solution was filtered through a membrane filter, and deposited on the substrate with a homogenizer, and then operated at 200 rpm for 500 seconds, and then operated at 5000 rpm for 5 seconds. Every time the glue is homogen...

Embodiment 2

[0025] The weighed 0.05205g (0.0005mol) Li(C 2 h 3 o 2 ) 2 2H 2 O and 2.36163g (0.0093mol) (C 2 h 3 o 2 ) 2 Ni·4H 2 O dissolved in 40ml CH 3 OCH 2 CH 2 In OH solvent, heat the solution to 150°C and keep stirring for 2 hours of dehydration reaction. After cooling the solution to 90°C, add 0.05801g (0.002mol) Ti(O·(CH 2 ) 2 ·CH 3 ) 4 , the solution was reheated to 150°C with stirring and reflux for 2 hours, and then with CH 3 OCH 2 CH 2 OH adjusts the concentration of the solution, and adds 5 milliliters of glacial acetic acid as a stabilizer to obtain a Li-Ti-Ni-O precursor solution; a thin film is prepared with a homogenizer, and the substrate is a platinum electrode substrate [Pt / Ti / SiO 2 / Si]. Before homogenizing the film, the precursor solution was filtered through a membrane filter, and deposited on the substrate with a homogenizer, and operated at 1000 rpm for 500 seconds, and then operated at 4000 rpm for 100 seconds. Every time the glue is blended, th...

Embodiment 3

[0027] The weighed 0.52051g (0.005mol) Li(C 2 h 3 o 2 ) 2 2H 2 O and 0.76182g (0.003mol) (C 2 h 3 o 2 ) 2 Ni·4H 2 O dissolved in 40ml CH 3 OCH 2 CH 2 In OH solvent, heat the solution to 130°C and keep stirring for 4 hours of dehydration reaction. After cooling the solution to 90°C, add 0.58012g (0.002mol) Ti(O·(CH 2 ) 2 ·CH 3 ) 4 , stirred and refluxed at 130 °C for 4 hours, and then with CH 3 OCH 2 CH 2 OH to adjust the concentration of the solution, and add 3 milliliters of glacial acetic acid as a stabilizer to obtain a Li-Ti-Ni-O precursor solution; use a homogenizer to prepare a thin film, and the substrate is a platinum electrode substrate [Pt / Ti / SiO 2 / Si]. Before homogenizing the film, the precursor solution was filtered through a filter, and deposited on the substrate with a homogenizer, and then operated at 800 rpm for 30 seconds, and then operated at 3000 rpm for 30 seconds. Every time the glue is blended, the film is thermally decomposed at 600°C...

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Abstract

The invention provides a lithium titanium co-doped nickel oxide base ceramic film and preparation method, wherein the ceramic film has the chemical formula of LixTiyNi1-x-yO, wherein x=0.05-0.5, Y=0.02-0.2. The precursor solution is prepared through the conventional sol-gel process, and rubber spreading machine is employed for the preparing the thin film which can meet the requirement of various high permittivity thin-film devices, in the dielectric medium field, it can be applied into the production of thin-film capacitor and DRAMs.

Description

technical field [0001] The invention belongs to the technical field of oxide ceramic film materials, and in particular provides a lithium-titanium co-doped nickel oxide-based ceramic film and a preparation method thereof, which are suitable for dielectric film materials. Background technique [0002] Nickel oxide-based film not only has good chemical stability, is a lead-free material, but also has good optical, electrical, and magnetic properties, and is widely used. It is used as antiferromagnetic substances, electrochromic materials, p-type transparent conductor materials, chemically sensitive materials (such as gas sensitive materials) and electrode materials for batteries [Y.M.Lu, W.S.Hwang et al.: Surface and Coatings Technology, 155 (2002) 231-235]. Currently researched doped nickel oxide-based thin film materials include Li x NiO y 、LiNi 1-x co x o 2 、LiNi 1-x mn x o 2 、LiNi 0.5 co 0.5 VO 2 etc., but these studies mainly focus on electrochromic properties...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/28C04B35/622
Inventor 张波萍董燕张雅如
Owner UNIV OF SCI & TECH BEIJING