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Method for manufacturing electric pumping edge emission semiconductor micro cavity laser

A manufacturing method and semiconductor technology, applied in the direction of semiconductor lasers, lasers, laser components, etc., can solve the problems of complicated dry etching process, complicated operation, and high cost

Inactive Publication Date: 2007-03-14
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Disadvantages The dry etching process is complicated, requires special equipment, complicated operation, and high cost

Method used

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  • Method for manufacturing electric pumping edge emission semiconductor micro cavity laser
  • Method for manufacturing electric pumping edge emission semiconductor micro cavity laser

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Embodiment Construction

[0020] Please refer to the accompanying drawings, Fig. 1 is a top view of the micro-cylindrical resonator, with electrodes in the middle; Fig. 2 is a side view of the micro-cylindrical resonator. The invention relates to a method for manufacturing an electrically pumped edge-emitting semiconductor microcavity laser, which includes first depositing a titanium / gold film layer as an electrode on the material for making the device, and then using a photolithography plate designed according to the shape of the required electrode to carry out the process. Photolithography, etch out the required electrode 1 after development, the appearance is shown in Figure 1, the specific shape of the electrode is determined by the requirements of the device to be produced; after obtaining the electrode appearance, overlay is carried out, and the photolithography plate used for overlay should be based on The shape of the resonant cavity is designed, and finally the resonant cavity 2 and the bracket...

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Abstract

A method for making an electric pump radiation semiconductor laser, which contains depositing electrode on semiconductor material, making electrode by photo etching and wet method corrosion, registration photo etching, then making resonant cavity and support frame by multi-step corrosion.

Description

technical field [0001] The invention belongs to a manufacturing process of a semiconductor device, in particular to a manufacturing method of an electrically pumped edge-emitting semiconductor microcavity laser. Background technique [0002] Semiconductor microcavity lasers, especially microcylindrical resonator lasers, are a kind of optoelectronic devices developed in the past ten years, because they can use the semiconductor material itself to increase the refractive index and the surrounding air with low refractive index to form total internal reflection, and the volume Small, the scale in one or three dimensions is the order of wavelength, and only a few optical modes exist in the gain cavity, thus greatly increasing the probability of spontaneous emission coupling into the lasing mode, thereby greatly reducing the lasing threshold. And small size, high integration, can achieve large-scale integration. [0003] However, its development is subject to some restrictions, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S5/00
Inventor 陆秀真常秀兰李成明刘峰奇王占国
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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