Flow pattern of air conditioning and purifying system in cleaning room

An air conditioning and purification system technology, applied in air conditioning systems, space heating and ventilation, household heating, etc., can solve problems affecting the service life of high-efficiency filters 1, air volume, wind pressure limitations, and small room for adjustment, etc., to achieve The effect of low noise, saving operating cost, and simplifying the sealing form

Inactive Publication Date: 2007-08-01
WUXI CHINA RESOURCES MICROELECTRONICS
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The cleanliness level of this form of clean room will not be too high; Figure 1 B shows that the static pressure box layer 9 is positive pressure compared with the clean room 2, and the seal between the high efficiency filter 1 and the keel frame 20 is the seal of the liquid tank 22 Form, only potting sealant 23 can ensure the cleanliness; Figure 1 C shows that the static pressure box layer 9 is positive pressure compared with the clean room 2, and the seal between the high-efficiency filter 1 and the keel frame 20 is also in the form of the liquid tank 22 , only potting sealant 23 can ensure the cleanliness; D of Fig. 1 shows: all adopt the form of FFU (that is, the fan and the high-efficiency filter form an integral unit), although the static pressure box layer 9 is negative pressure compared with the clean room 2, However, due to its small fan, the air volume and air pressure are limited, and the room for adjustment is small, which affects the service life of the high-efficiency filter 1

Method used

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  • Flow pattern of air conditioning and purifying system in cleaning room
  • Flow pattern of air conditioning and purifying system in cleaning room
  • Flow pattern of air conditioning and purifying system in cleaning room

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Embodiment Construction

[0034] 1. High-efficiency filter, 2. Clean room, 3. Return air outlet, 4. Return air, 5. Fresh air air conditioning unit, 6. Fresh air, 7. Circulating fan, 8. Air inlet, 9. Static pressure box layer, 10. Lower mezzanine, 11. Self-circulating fan, 12. Raised floor with holes, 14. Equipment area or return air area, 15. Return air duct, 16. Surface cooler, 17. Suspension rod, 18. Wall plate, 19. Clean lighting, 20, keel frame, 22, liquid tank, 23, sealant, 25, tuyere, 26, fan, 27, air duct, 28, shell, 29, sealing gasket.

[0035]As shown in Figure 7: a perforated raised floor 12 is set between the clean room 2 and the lower mezzanine 10 below to separate it. The top of the clean room 2 is a plenum chamber layer 9, and between the clean room 2 and the plenum chamber layer 9 That is, a high-efficiency filter 1 is arranged on the top of the clean room 2 . Both sides of the clean room 2 are return air passages 15, and the fresh air 6 is sent into the return air passage 15 by the fre...

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Abstract

The air conditioning and purifying system flow pattern for clean room relates to air conditioning and purifying system specially for clean room. The design scheme of the present invention includes movable floor between the clean room and the lower sandwich layer, upper static pressure box, efficient filter in the top of the clean room, and return airway on two sides of the clean room. The present invention features that inside the static pressure box, there are several self-circulating blowers with medium efficiency filtering section, surface cooling section, blower section and air outlet section. The air outlet section distributes treated air via air duct to several efficient air outlets with efficient filter and clean room successively. Each of the air outlets includes efficient filer and casing with air inlet port for connecting air duct and flow homogenizing board.

Description

technical field [0001] The invention relates to an air conditioning system, in particular to an air conditioning and purification system specially used in a clean room. Background technique [0002] With the continuous development of modern industry and science and technology, in order to ensure the high quality, high precision, high purity and high yield of products, a production environment with a high degree of cleanliness is required. For example, the production and manufacturing processes of food processing, medical and sanitary facilities, medicine, and microelectronic chips are all required to be carried out in a clean environment with constant temperature and humidity. This constant temperature and humidity and high cleanliness environment is called a clean room or clean workshop. The air conditioning and purification system configured to meet the requirements of the clean room is called the clean room air conditioning and purification system. The so-called constan...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F24F3/16
Inventor 李曙光邹宗骐顾振建周伟民
Owner WUXI CHINA RESOURCES MICROELECTRONICS
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